JPS52121384A - Defect inspecting apparatus - Google Patents

Defect inspecting apparatus

Info

Publication number
JPS52121384A
JPS52121384A JP3852676A JP3852676A JPS52121384A JP S52121384 A JPS52121384 A JP S52121384A JP 3852676 A JP3852676 A JP 3852676A JP 3852676 A JP3852676 A JP 3852676A JP S52121384 A JPS52121384 A JP S52121384A
Authority
JP
Japan
Prior art keywords
inspecting apparatus
defect inspecting
signal
defect
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3852676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5728103B2 (da
Inventor
Kenji Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP3852676A priority Critical patent/JPS52121384A/ja
Publication of JPS52121384A publication Critical patent/JPS52121384A/ja
Publication of JPS5728103B2 publication Critical patent/JPS5728103B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3852676A 1976-04-06 1976-04-06 Defect inspecting apparatus Granted JPS52121384A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3852676A JPS52121384A (en) 1976-04-06 1976-04-06 Defect inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3852676A JPS52121384A (en) 1976-04-06 1976-04-06 Defect inspecting apparatus

Publications (2)

Publication Number Publication Date
JPS52121384A true JPS52121384A (en) 1977-10-12
JPS5728103B2 JPS5728103B2 (da) 1982-06-15

Family

ID=12527712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3852676A Granted JPS52121384A (en) 1976-04-06 1976-04-06 Defect inspecting apparatus

Country Status (1)

Country Link
JP (1) JPS52121384A (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658449U (da) * 1979-10-08 1981-05-19

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658449U (da) * 1979-10-08 1981-05-19

Also Published As

Publication number Publication date
JPS5728103B2 (da) 1982-06-15

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