JPS52120765A - Liquid-phase epitaxial growing boat - Google Patents
Liquid-phase epitaxial growing boatInfo
- Publication number
- JPS52120765A JPS52120765A JP3797276A JP3797276A JPS52120765A JP S52120765 A JPS52120765 A JP S52120765A JP 3797276 A JP3797276 A JP 3797276A JP 3797276 A JP3797276 A JP 3797276A JP S52120765 A JPS52120765 A JP S52120765A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- phase epitaxial
- epitaxial growing
- fusing liquid
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007791 liquid phase Substances 0.000 title 1
- 239000007788 liquid Substances 0.000 abstract 3
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3797276A JPS52120765A (en) | 1976-04-05 | 1976-04-05 | Liquid-phase epitaxial growing boat |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3797276A JPS52120765A (en) | 1976-04-05 | 1976-04-05 | Liquid-phase epitaxial growing boat |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52120765A true JPS52120765A (en) | 1977-10-11 |
JPS552891B2 JPS552891B2 (enrdf_load_html_response) | 1980-01-22 |
Family
ID=12512466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3797276A Granted JPS52120765A (en) | 1976-04-05 | 1976-04-05 | Liquid-phase epitaxial growing boat |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52120765A (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3617333A1 (de) * | 1985-05-25 | 1986-11-27 | Mitsubishi Denki K.K., Tokio/Tokyo | Vorrichtung zur erzeugung von epitaxialwachstum aus einer fluessigphase |
-
1976
- 1976-04-05 JP JP3797276A patent/JPS52120765A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3617333A1 (de) * | 1985-05-25 | 1986-11-27 | Mitsubishi Denki K.K., Tokio/Tokyo | Vorrichtung zur erzeugung von epitaxialwachstum aus einer fluessigphase |
Also Published As
Publication number | Publication date |
---|---|
JPS552891B2 (enrdf_load_html_response) | 1980-01-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52120765A (en) | Liquid-phase epitaxial growing boat | |
JPS5423474A (en) | Mesa groove forming method for semiconductor element | |
JPS536567A (en) | Device for effecting liquid-phase epitaxial growth | |
JPS5326663A (en) | Manu facture of semiconductor device | |
JPS52141565A (en) | Manufacture of semiconductor unit | |
JPS52153097A (en) | Fused fuel holding device | |
JPS5289471A (en) | Production of semiconductor device | |
JPS52112276A (en) | Liquid-phase epitaxial growth system | |
JPS5233670A (en) | Process for preparation of saccharin | |
JPS52149337A (en) | System selection device | |
JPS537121A (en) | Electric charge transfer unit | |
JPS5389054A (en) | Supercooling liquid gas feeding device | |
JPS528515A (en) | Inner lined vessel | |
JPS538853A (en) | Cooling water temperature controller | |
JPS5286058A (en) | Liquid phase epitaxial growth | |
JPS52134933A (en) | Auto-choke type carbureter | |
JPS51132799A (en) | Composite superconductive wire-materials | |
JPS52112289A (en) | Semiconductor ic unit | |
JPS5234128A (en) | Selective fuel supply to cylinders | |
JPS52143540A (en) | Cooling system utilized therm of lng | |
JPS5246034A (en) | Process for preparation of substituted phenylpropylaldehyde | |
JPS53115178A (en) | Production of semiconductor device | |
JPS5334476A (en) | Thyristor cooler | |
JPS52141564A (en) | Manufacture of semiconductor unit | |
JPS5379392A (en) | Productin of semiconductor device |