JPS52120759A - Capsule unit for electronic microscope - Google Patents

Capsule unit for electronic microscope

Info

Publication number
JPS52120759A
JPS52120759A JP3728376A JP3728376A JPS52120759A JP S52120759 A JPS52120759 A JP S52120759A JP 3728376 A JP3728376 A JP 3728376A JP 3728376 A JP3728376 A JP 3728376A JP S52120759 A JPS52120759 A JP S52120759A
Authority
JP
Japan
Prior art keywords
electronic microscope
capsule unit
deffective
attachment
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3728376A
Other languages
Japanese (ja)
Other versions
JPS587022B2 (en
Inventor
Shigeo Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP51037283A priority Critical patent/JPS587022B2/en
Publication of JPS52120759A publication Critical patent/JPS52120759A/en
Publication of JPS587022B2 publication Critical patent/JPS587022B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To realize highly dependable gas reaction experiment by detecting the deffective residual gas amount through attachment of ion pump into the sample room.
COPYRIGHT: (C)1977,JPO&Japio
JP51037283A 1976-04-05 1976-04-05 Capsule device for electron microscope Expired JPS587022B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51037283A JPS587022B2 (en) 1976-04-05 1976-04-05 Capsule device for electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51037283A JPS587022B2 (en) 1976-04-05 1976-04-05 Capsule device for electron microscope

Publications (2)

Publication Number Publication Date
JPS52120759A true JPS52120759A (en) 1977-10-11
JPS587022B2 JPS587022B2 (en) 1983-02-08

Family

ID=12493362

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51037283A Expired JPS587022B2 (en) 1976-04-05 1976-04-05 Capsule device for electron microscope

Country Status (1)

Country Link
JP (1) JPS587022B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925814U (en) * 1972-06-09 1974-03-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925814U (en) * 1972-06-09 1974-03-05

Also Published As

Publication number Publication date
JPS587022B2 (en) 1983-02-08

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