JPS5212065B2 - - Google Patents

Info

Publication number
JPS5212065B2
JPS5212065B2 JP7150673A JP7150673A JPS5212065B2 JP S5212065 B2 JPS5212065 B2 JP S5212065B2 JP 7150673 A JP7150673 A JP 7150673A JP 7150673 A JP7150673 A JP 7150673A JP S5212065 B2 JPS5212065 B2 JP S5212065B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7150673A
Other languages
Japanese (ja)
Other versions
JPS5021679A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7150673A priority Critical patent/JPS5212065B2/ja
Publication of JPS5021679A publication Critical patent/JPS5021679A/ja
Publication of JPS5212065B2 publication Critical patent/JPS5212065B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP7150673A 1973-06-25 1973-06-25 Expired JPS5212065B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7150673A JPS5212065B2 (enrdf_load_stackoverflow) 1973-06-25 1973-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7150673A JPS5212065B2 (enrdf_load_stackoverflow) 1973-06-25 1973-06-25

Publications (2)

Publication Number Publication Date
JPS5021679A JPS5021679A (enrdf_load_stackoverflow) 1975-03-07
JPS5212065B2 true JPS5212065B2 (enrdf_load_stackoverflow) 1977-04-04

Family

ID=13462628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7150673A Expired JPS5212065B2 (enrdf_load_stackoverflow) 1973-06-25 1973-06-25

Country Status (1)

Country Link
JP (1) JPS5212065B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648336U (enrdf_load_stackoverflow) * 1979-09-21 1981-04-30

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5394767A (en) * 1977-01-31 1978-08-19 Hitachi Ltd Manufacture of semiconductor device
JPS5477068A (en) * 1977-12-02 1979-06-20 Hitachi Ltd Pattern forming method
JPS58127328A (ja) * 1982-01-26 1983-07-29 Seiko Epson Corp 半導体基板の絶縁保護膜の蝕刻方法
JPS6243133A (ja) * 1985-08-20 1987-02-25 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648336U (enrdf_load_stackoverflow) * 1979-09-21 1981-04-30

Also Published As

Publication number Publication date
JPS5021679A (enrdf_load_stackoverflow) 1975-03-07

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