JPS52109373A - Method of deflecting and scanning electron beam - Google Patents

Method of deflecting and scanning electron beam

Info

Publication number
JPS52109373A
JPS52109373A JP2591776A JP2591776A JPS52109373A JP S52109373 A JPS52109373 A JP S52109373A JP 2591776 A JP2591776 A JP 2591776A JP 2591776 A JP2591776 A JP 2591776A JP S52109373 A JPS52109373 A JP S52109373A
Authority
JP
Japan
Prior art keywords
deflecting
electron beam
scanning electron
scanning
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2591776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS546476B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Takashi Souma
Masanori Idesawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP2591776A priority Critical patent/JPS52109373A/ja
Publication of JPS52109373A publication Critical patent/JPS52109373A/ja
Publication of JPS546476B2 publication Critical patent/JPS546476B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP2591776A 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam Granted JPS52109373A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2591776A JPS52109373A (en) 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2591776A JPS52109373A (en) 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam

Publications (2)

Publication Number Publication Date
JPS52109373A true JPS52109373A (en) 1977-09-13
JPS546476B2 JPS546476B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-28

Family

ID=12179118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2591776A Granted JPS52109373A (en) 1976-03-10 1976-03-10 Method of deflecting and scanning electron beam

Country Status (1)

Country Link
JP (1) JPS52109373A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137977A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Electron-beam exposure unit
JPS57181122A (en) * 1981-04-16 1982-11-08 Control Data Corp Electron beam array lithographic method and device
JPS5825235A (ja) * 1981-05-21 1983-02-15 コントロ−ル・デ−タ・コ−ポレ−シヨン 多重チヤンネル電子ビ−ム・アレイ・リソグラフイ装置
JPS61192444U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-05-01 1986-11-29

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DENSHI TOKYO=1975 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137977A (en) * 1978-04-19 1979-10-26 Hitachi Ltd Electron-beam exposure unit
JPS57181122A (en) * 1981-04-16 1982-11-08 Control Data Corp Electron beam array lithographic method and device
JPS5825235A (ja) * 1981-05-21 1983-02-15 コントロ−ル・デ−タ・コ−ポレ−シヨン 多重チヤンネル電子ビ−ム・アレイ・リソグラフイ装置
JPS61192444U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-05-01 1986-11-29

Also Published As

Publication number Publication date
JPS546476B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-28

Similar Documents

Publication Publication Date Title
JPS5648052A (en) Method of double deflecting and scanning charged particle beam and condenser
ZA762947B (en) Beam construction and method of manufacture
JPS5472683A (en) Electron beam device and method of using same
JPS54144863A (en) Scan electron microscope
JPS54164385A (en) Ultrasoniccwave beam scanning technique and its device
JPS5474377A (en) Device for searching electron beam for electron beam device and method of driving same
DE3279331D1 (en) Method of using an electron beam
DE3066694D1 (en) Method of electron beam exposure
JPS5373064A (en) Device for deflecting electron beam
JPS54150997A (en) Electron beam generator
DE2964232D1 (en) Electron beam investigation process and electron impact spectrometer therefor
JPS52109373A (en) Method of deflecting and scanning electron beam
JPS5311854A (en) Split electron beam welding and apparatus therefor
JPS5238442A (en) Electron beam welding method
JPS5397949A (en) Electron beam or laser beam welding method and its device
EP0078578A3 (en) Method of using an electron beam
JPS5447423A (en) Deflecting device and method of producing same
JPS5650793A (en) Electron beam welding method and its device
AU533750B2 (en) Focussing and deflecting electron beams
JPS5642200A (en) Electron beam projecting window and production thereof
JPS5457950A (en) Method of focusing in electron beam unit
JPS54150082A (en) Method of drawing pattern with electron beam
JPS5366841A (en) Electron beam welding method
JPS52107250A (en) Method of electron beam welding
JPS5311853A (en) Magnettdriven type split electron beam welding and apparatus therefor