JPS52104067A - Dust proof baking method - Google Patents

Dust proof baking method

Info

Publication number
JPS52104067A
JPS52104067A JP1998476A JP1998476A JPS52104067A JP S52104067 A JPS52104067 A JP S52104067A JP 1998476 A JP1998476 A JP 1998476A JP 1998476 A JP1998476 A JP 1998476A JP S52104067 A JPS52104067 A JP S52104067A
Authority
JP
Japan
Prior art keywords
dust proof
baking method
proof baking
furnace
hot plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998476A
Other languages
English (en)
Other versions
JPS5925372B2 (ja
Inventor
Kiyoshi Nakagawa
Masahiro Dan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP1998476A priority Critical patent/JPS5925372B2/ja
Publication of JPS52104067A publication Critical patent/JPS52104067A/ja
Publication of JPS5925372B2 publication Critical patent/JPS5925372B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1998476A 1976-02-27 1976-02-27 ベ−キング装置 Expired JPS5925372B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1998476A JPS5925372B2 (ja) 1976-02-27 1976-02-27 ベ−キング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1998476A JPS5925372B2 (ja) 1976-02-27 1976-02-27 ベ−キング装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2851684A Division JPS59161034A (ja) 1984-02-20 1984-02-20 ベ−キング方法

Publications (2)

Publication Number Publication Date
JPS52104067A true JPS52104067A (en) 1977-09-01
JPS5925372B2 JPS5925372B2 (ja) 1984-06-16

Family

ID=12014433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1998476A Expired JPS5925372B2 (ja) 1976-02-27 1976-02-27 ベ−キング装置

Country Status (1)

Country Link
JP (1) JPS5925372B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPS6457764A (en) * 1987-08-28 1989-03-06 Matsushita Electric Ind Co Ltd Manufacture of photovoltaic element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457764A (en) * 1987-08-28 1989-03-06 Matsushita Electric Ind Co Ltd Manufacture of photovoltaic element
JPS64738A (en) * 1988-05-20 1989-01-05 Hitachi Ltd Heat treatment of semiconductor wafer
JPH0424855B2 (ja) * 1988-05-20 1992-04-28 Hitachi Ltd

Also Published As

Publication number Publication date
JPS5925372B2 (ja) 1984-06-16

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