JPS52101798A - Charged particle beam machining method and device thereof - Google Patents

Charged particle beam machining method and device thereof

Info

Publication number
JPS52101798A
JPS52101798A JP1868176A JP1868176A JPS52101798A JP S52101798 A JPS52101798 A JP S52101798A JP 1868176 A JP1868176 A JP 1868176A JP 1868176 A JP1868176 A JP 1868176A JP S52101798 A JPS52101798 A JP S52101798A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
machining method
beam machining
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1868176A
Other languages
Japanese (ja)
Other versions
JPS5738351B2 (en
Inventor
Masahiro Tano
Masaru Manabe
Fumiharu Yabunaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1868176A priority Critical patent/JPS52101798A/en
Publication of JPS52101798A publication Critical patent/JPS52101798A/en
Publication of JPS5738351B2 publication Critical patent/JPS5738351B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To provide a charged particle beam machining method wherein shapes of the cutting face and electric power density distribution of the heated source are made possible to control by deflecting and scanning in a plane condition the charged particle beam from a charged particle source against a work piece, and also by controlling the charged particle beam in synchronizing with the scanning.
COPYRIGHT: (C)1977,JPO&Japio
JP1868176A 1976-02-23 1976-02-23 Charged particle beam machining method and device thereof Granted JPS52101798A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1868176A JPS52101798A (en) 1976-02-23 1976-02-23 Charged particle beam machining method and device thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1868176A JPS52101798A (en) 1976-02-23 1976-02-23 Charged particle beam machining method and device thereof

Publications (2)

Publication Number Publication Date
JPS52101798A true JPS52101798A (en) 1977-08-26
JPS5738351B2 JPS5738351B2 (en) 1982-08-14

Family

ID=11978337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1868176A Granted JPS52101798A (en) 1976-02-23 1976-02-23 Charged particle beam machining method and device thereof

Country Status (1)

Country Link
JP (1) JPS52101798A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106750A (en) * 1981-12-18 1983-06-25 Toshiba Corp Focus ion beam processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106750A (en) * 1981-12-18 1983-06-25 Toshiba Corp Focus ion beam processing
JPH0328017B2 (en) * 1981-12-18 1991-04-17 Tokyo Shibaura Electric Co

Also Published As

Publication number Publication date
JPS5738351B2 (en) 1982-08-14

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