JPS52101798A - Charged particle beam machining method and device thereof - Google Patents
Charged particle beam machining method and device thereofInfo
- Publication number
- JPS52101798A JPS52101798A JP1868176A JP1868176A JPS52101798A JP S52101798 A JPS52101798 A JP S52101798A JP 1868176 A JP1868176 A JP 1868176A JP 1868176 A JP1868176 A JP 1868176A JP S52101798 A JPS52101798 A JP S52101798A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- machining method
- beam machining
- scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To provide a charged particle beam machining method wherein shapes of the cutting face and electric power density distribution of the heated source are made possible to control by deflecting and scanning in a plane condition the charged particle beam from a charged particle source against a work piece, and also by controlling the charged particle beam in synchronizing with the scanning.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1868176A JPS52101798A (en) | 1976-02-23 | 1976-02-23 | Charged particle beam machining method and device thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1868176A JPS52101798A (en) | 1976-02-23 | 1976-02-23 | Charged particle beam machining method and device thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52101798A true JPS52101798A (en) | 1977-08-26 |
JPS5738351B2 JPS5738351B2 (en) | 1982-08-14 |
Family
ID=11978337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1868176A Granted JPS52101798A (en) | 1976-02-23 | 1976-02-23 | Charged particle beam machining method and device thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52101798A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58106750A (en) * | 1981-12-18 | 1983-06-25 | Toshiba Corp | Focus ion beam processing |
-
1976
- 1976-02-23 JP JP1868176A patent/JPS52101798A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58106750A (en) * | 1981-12-18 | 1983-06-25 | Toshiba Corp | Focus ion beam processing |
JPH0328017B2 (en) * | 1981-12-18 | 1991-04-17 | Tokyo Shibaura Electric Co |
Also Published As
Publication number | Publication date |
---|---|
JPS5738351B2 (en) | 1982-08-14 |
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