JPS53113233A - Dry corroding apparatus - Google Patents

Dry corroding apparatus

Info

Publication number
JPS53113233A
JPS53113233A JP2906177A JP2906177A JPS53113233A JP S53113233 A JPS53113233 A JP S53113233A JP 2906177 A JP2906177 A JP 2906177A JP 2906177 A JP2906177 A JP 2906177A JP S53113233 A JPS53113233 A JP S53113233A
Authority
JP
Japan
Prior art keywords
dry
corroding
corroding apparatus
laser beam
resultant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2906177A
Other languages
Japanese (ja)
Other versions
JPS5928632B2 (en
Inventor
Toshio Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2906177A priority Critical patent/JPS5928632B2/en
Publication of JPS53113233A publication Critical patent/JPS53113233A/en
Publication of JPS5928632B2 publication Critical patent/JPS5928632B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising

Abstract

PURPOSE:To form a film as resultant without deforming metal material to be processed by employing CO2 laser beam for heating power in a dry corroding apparatus using laser beam.
JP2906177A 1977-03-15 1977-03-15 dry etching equipment Expired JPS5928632B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2906177A JPS5928632B2 (en) 1977-03-15 1977-03-15 dry etching equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2906177A JPS5928632B2 (en) 1977-03-15 1977-03-15 dry etching equipment

Publications (2)

Publication Number Publication Date
JPS53113233A true JPS53113233A (en) 1978-10-03
JPS5928632B2 JPS5928632B2 (en) 1984-07-14

Family

ID=12265842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2906177A Expired JPS5928632B2 (en) 1977-03-15 1977-03-15 dry etching equipment

Country Status (1)

Country Link
JP (1) JPS5928632B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0204318A2 (en) * 1985-06-04 1986-12-10 Nippon Steel Corporation Method of improving functions of surface of alloy steel by means of irradiation of laser beam, and alloy steel and structure made by the method
KR20160132938A (en) * 2014-03-11 2016-11-21 에체-따르 에세.아. Method and system for laser hardening of a surface of a workpiece

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0204318A2 (en) * 1985-06-04 1986-12-10 Nippon Steel Corporation Method of improving functions of surface of alloy steel by means of irradiation of laser beam, and alloy steel and structure made by the method
KR20160132938A (en) * 2014-03-11 2016-11-21 에체-따르 에세.아. Method and system for laser hardening of a surface of a workpiece
JP2017514990A (en) * 2014-03-11 2017-06-08 イーティーエックスイー−ティーエーアール、 エス．エー． Method and system for laser curing a surface of a workpiece
US10648056B2 (en) 2014-03-11 2020-05-12 Etxe-Tar, S.A. Method and system for laser hardening of a surface of a workplace

Also Published As

Publication number Publication date
JPS5928632B2 (en) 1984-07-14

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