JPS5193666A - - Google Patents
Info
- Publication number
- JPS5193666A JPS5193666A JP50017946A JP1794675A JPS5193666A JP S5193666 A JPS5193666 A JP S5193666A JP 50017946 A JP50017946 A JP 50017946A JP 1794675 A JP1794675 A JP 1794675A JP S5193666 A JPS5193666 A JP S5193666A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50017946A JPS5818783B2 (ja) | 1975-02-14 | 1975-02-14 | ハンドウタイナイブリヨウイキゼツエンホウホウ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50017946A JPS5818783B2 (ja) | 1975-02-14 | 1975-02-14 | ハンドウタイナイブリヨウイキゼツエンホウホウ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5193666A true JPS5193666A (ja) | 1976-08-17 |
| JPS5818783B2 JPS5818783B2 (ja) | 1983-04-14 |
Family
ID=11957930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50017946A Expired JPS5818783B2 (ja) | 1975-02-14 | 1975-02-14 | ハンドウタイナイブリヨウイキゼツエンホウホウ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5818783B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021190667A (ja) * | 2020-06-05 | 2021-12-13 | 信越半導体株式会社 | 高周波半導体装置の製造方法及び高周波半導体装置 |
| WO2022024526A1 (ja) | 2020-07-29 | 2022-02-03 | 信越半導体株式会社 | 量子コンピュータ用半導体装置の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4825816A (ja) * | 1971-08-11 | 1973-04-04 |
-
1975
- 1975-02-14 JP JP50017946A patent/JPS5818783B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4825816A (ja) * | 1971-08-11 | 1973-04-04 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021190667A (ja) * | 2020-06-05 | 2021-12-13 | 信越半導体株式会社 | 高周波半導体装置の製造方法及び高周波半導体装置 |
| WO2022024526A1 (ja) | 2020-07-29 | 2022-02-03 | 信越半導体株式会社 | 量子コンピュータ用半導体装置の製造方法 |
| JP2022025657A (ja) * | 2020-07-29 | 2022-02-10 | 信越半導体株式会社 | 量子コンピュータ用半導体装置の製造方法 |
| KR20230044151A (ko) | 2020-07-29 | 2023-04-03 | 신에쯔 한도타이 가부시키가이샤 | 양자 컴퓨터용 반도체 장치의 제조 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5818783B2 (ja) | 1983-04-14 |