JPS5193665A - - Google Patents
Info
- Publication number
- JPS5193665A JPS5193665A JP50018645A JP1864575A JPS5193665A JP S5193665 A JPS5193665 A JP S5193665A JP 50018645 A JP50018645 A JP 50018645A JP 1864575 A JP1864575 A JP 1864575A JP S5193665 A JPS5193665 A JP S5193665A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50018645A JPS5193665A (enExample) | 1975-02-14 | 1975-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50018645A JPS5193665A (enExample) | 1975-02-14 | 1975-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5193665A true JPS5193665A (enExample) | 1976-08-17 |
Family
ID=11977336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50018645A Pending JPS5193665A (enExample) | 1975-02-14 | 1975-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5193665A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59149029A (ja) * | 1983-02-16 | 1984-08-25 | Agency Of Ind Science & Technol | 化合物半導体結晶基板の評価装置 |
| JPS6050936A (ja) * | 1983-08-30 | 1985-03-22 | Fujitsu Ltd | 化合物半導体結晶の組成分布評価法 |
| JPS62257739A (ja) * | 1986-04-30 | 1987-11-10 | Toshiba Ceramics Co Ltd | シリコンウエ−ハ及びその選別装置 |
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1975
- 1975-02-14 JP JP50018645A patent/JPS5193665A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59149029A (ja) * | 1983-02-16 | 1984-08-25 | Agency Of Ind Science & Technol | 化合物半導体結晶基板の評価装置 |
| JPS6050936A (ja) * | 1983-08-30 | 1985-03-22 | Fujitsu Ltd | 化合物半導体結晶の組成分布評価法 |
| JPS62257739A (ja) * | 1986-04-30 | 1987-11-10 | Toshiba Ceramics Co Ltd | シリコンウエ−ハ及びその選別装置 |