JPS5192182A - - Google Patents
Info
- Publication number
- JPS5192182A JPS5192182A JP50017066A JP1706675A JPS5192182A JP S5192182 A JPS5192182 A JP S5192182A JP 50017066 A JP50017066 A JP 50017066A JP 1706675 A JP1706675 A JP 1706675A JP S5192182 A JPS5192182 A JP S5192182A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50017066A JPS5192182A (US07642317-20100105-C00010.png) | 1975-02-10 | 1975-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50017066A JPS5192182A (US07642317-20100105-C00010.png) | 1975-02-10 | 1975-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5192182A true JPS5192182A (US07642317-20100105-C00010.png) | 1976-08-12 |
Family
ID=11933602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50017066A Pending JPS5192182A (US07642317-20100105-C00010.png) | 1975-02-10 | 1975-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5192182A (US07642317-20100105-C00010.png) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5481075A (en) * | 1977-11-24 | 1979-06-28 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of detecting article image using electron beam |
| JPS5633829A (en) * | 1979-08-29 | 1981-04-04 | Fujitsu Ltd | Inspection of pattern |
| JPS5637626A (en) * | 1979-09-05 | 1981-04-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Inspection device for pattern |
| JPS57113227A (en) * | 1980-12-19 | 1982-07-14 | Ibm | Method and device for inspecting article to be inspected with pattern |
| JPS57162335A (en) * | 1981-03-30 | 1982-10-06 | Nec Corp | Vector scan type flaw detector |
| JPS5811842A (ja) * | 1981-07-14 | 1983-01-22 | Seiko Instr & Electronics Ltd | 高速ｘ線マツピング装置 |
| JPS5963725A (ja) * | 1982-10-05 | 1984-04-11 | Toshiba Corp | パタ−ン検査装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4318128Y1 (US07642317-20100105-C00010.png) * | 1966-11-28 | 1968-07-26 |
-
1975
- 1975-02-10 JP JP50017066A patent/JPS5192182A/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4318128Y1 (US07642317-20100105-C00010.png) * | 1966-11-28 | 1968-07-26 |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5481075A (en) * | 1977-11-24 | 1979-06-28 | Cho Lsi Gijutsu Kenkyu Kumiai | Method of detecting article image using electron beam |
| JPS6127899B2 (US07642317-20100105-C00010.png) * | 1977-11-24 | 1986-06-27 | Cho Eru Esu Ai Gijutsu Kenkyu Kumiai | |
| JPS5633829A (en) * | 1979-08-29 | 1981-04-04 | Fujitsu Ltd | Inspection of pattern |
| JPS5637626A (en) * | 1979-09-05 | 1981-04-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Inspection device for pattern |
| JPS57113227A (en) * | 1980-12-19 | 1982-07-14 | Ibm | Method and device for inspecting article to be inspected with pattern |
| JPS57162335A (en) * | 1981-03-30 | 1982-10-06 | Nec Corp | Vector scan type flaw detector |
| JPS5811842A (ja) * | 1981-07-14 | 1983-01-22 | Seiko Instr & Electronics Ltd | 高速ｘ線マツピング装置 |
| JPH0332736B2 (US07642317-20100105-C00010.png) * | 1981-07-14 | 1991-05-14 | Seikoo Denshi Kogyo Kk | |
| JPS5963725A (ja) * | 1982-10-05 | 1984-04-11 | Toshiba Corp | パタ−ン検査装置 |
| JPS633450B2 (US07642317-20100105-C00010.png) * | 1982-10-05 | 1988-01-23 | Tokyo Shibaura Electric Co |
