JPS5192181A - X senrokopataankeiseihoho oyobi masukukiban - Google Patents
X senrokopataankeiseihoho oyobi masukukibanInfo
- Publication number
- JPS5192181A JPS5192181A JP1706375A JP1706375A JPS5192181A JP S5192181 A JPS5192181 A JP S5192181A JP 1706375 A JP1706375 A JP 1706375A JP 1706375 A JP1706375 A JP 1706375A JP S5192181 A JPS5192181 A JP S5192181A
- Authority
- JP
- Japan
- Prior art keywords
- senrokopataankeiseihoho
- masukukiban
- oyobi
- senrokopataankeiseihoho oyobi
- oyobi masukukiban
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1706375A JPS5192181A (en) | 1975-02-10 | 1975-02-10 | X senrokopataankeiseihoho oyobi masukukiban |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1706375A JPS5192181A (en) | 1975-02-10 | 1975-02-10 | X senrokopataankeiseihoho oyobi masukukiban |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5192181A true JPS5192181A (en) | 1976-08-12 |
JPS5413350B2 JPS5413350B2 (lv) | 1979-05-30 |
Family
ID=11933515
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1706375A Granted JPS5192181A (en) | 1975-02-10 | 1975-02-10 | X senrokopataankeiseihoho oyobi masukukiban |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5192181A (lv) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5317075A (en) * | 1976-07-30 | 1978-02-16 | Nec Corp | Production of silicon mask for x-ray exposure |
JPS5317076A (en) * | 1976-07-30 | 1978-02-16 | Nec Corp | Silicon mask for x-ray exposure and its production |
-
1975
- 1975-02-10 JP JP1706375A patent/JPS5192181A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5317075A (en) * | 1976-07-30 | 1978-02-16 | Nec Corp | Production of silicon mask for x-ray exposure |
JPS5317076A (en) * | 1976-07-30 | 1978-02-16 | Nec Corp | Silicon mask for x-ray exposure and its production |
JPS5337704B2 (lv) * | 1976-07-30 | 1978-10-11 | ||
JPS5337703B2 (lv) * | 1976-07-30 | 1978-10-11 |
Also Published As
Publication number | Publication date |
---|---|
JPS5413350B2 (lv) | 1979-05-30 |
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