JPS5192181A - X senrokopataankeiseihoho oyobi masukukiban - Google Patents

X senrokopataankeiseihoho oyobi masukukiban

Info

Publication number
JPS5192181A
JPS5192181A JP1706375A JP1706375A JPS5192181A JP S5192181 A JPS5192181 A JP S5192181A JP 1706375 A JP1706375 A JP 1706375A JP 1706375 A JP1706375 A JP 1706375A JP S5192181 A JPS5192181 A JP S5192181A
Authority
JP
Japan
Prior art keywords
senrokopataankeiseihoho
masukukiban
oyobi
senrokopataankeiseihoho oyobi
oyobi masukukiban
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1706375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5413350B2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1706375A priority Critical patent/JPS5192181A/ja
Publication of JPS5192181A publication Critical patent/JPS5192181A/ja
Publication of JPS5413350B2 publication Critical patent/JPS5413350B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • X-Ray Techniques (AREA)
  • ing And Chemical Polishing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1706375A 1975-02-10 1975-02-10 X senrokopataankeiseihoho oyobi masukukiban Granted JPS5192181A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1706375A JPS5192181A (en) 1975-02-10 1975-02-10 X senrokopataankeiseihoho oyobi masukukiban

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1706375A JPS5192181A (en) 1975-02-10 1975-02-10 X senrokopataankeiseihoho oyobi masukukiban

Publications (2)

Publication Number Publication Date
JPS5192181A true JPS5192181A (en) 1976-08-12
JPS5413350B2 JPS5413350B2 (enExample) 1979-05-30

Family

ID=11933515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1706375A Granted JPS5192181A (en) 1975-02-10 1975-02-10 X senrokopataankeiseihoho oyobi masukukiban

Country Status (1)

Country Link
JP (1) JPS5192181A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317076A (en) * 1976-07-30 1978-02-16 Nec Corp Silicon mask for x-ray exposure and its production
JPS5317075A (en) * 1976-07-30 1978-02-16 Nec Corp Production of silicon mask for x-ray exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5317076A (en) * 1976-07-30 1978-02-16 Nec Corp Silicon mask for x-ray exposure and its production
JPS5317075A (en) * 1976-07-30 1978-02-16 Nec Corp Production of silicon mask for x-ray exposure

Also Published As

Publication number Publication date
JPS5413350B2 (enExample) 1979-05-30

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