JPS5190500A - - Google Patents

Info

Publication number
JPS5190500A
JPS5190500A JP50015663A JP1566375A JPS5190500A JP S5190500 A JPS5190500 A JP S5190500A JP 50015663 A JP50015663 A JP 50015663A JP 1566375 A JP1566375 A JP 1566375A JP S5190500 A JPS5190500 A JP S5190500A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50015663A
Other languages
Japanese (ja)
Other versions
JPS587058B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50015663A priority Critical patent/JPS587058B2/ja
Publication of JPS5190500A publication Critical patent/JPS5190500A/ja
Publication of JPS587058B2 publication Critical patent/JPS587058B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
  • Inorganic Insulating Materials (AREA)
  • Chemical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP50015663A 1975-02-05 1975-02-05 サンカケイソハクマクノ セイゾウホウホウ Expired JPS587058B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50015663A JPS587058B2 (ja) 1975-02-05 1975-02-05 サンカケイソハクマクノ セイゾウホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50015663A JPS587058B2 (ja) 1975-02-05 1975-02-05 サンカケイソハクマクノ セイゾウホウホウ

Publications (2)

Publication Number Publication Date
JPS5190500A true JPS5190500A (enrdf_load_html_response) 1976-08-07
JPS587058B2 JPS587058B2 (ja) 1983-02-08

Family

ID=11894967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50015663A Expired JPS587058B2 (ja) 1975-02-05 1975-02-05 サンカケイソハクマクノ セイゾウホウホウ

Country Status (1)

Country Link
JP (1) JPS587058B2 (enrdf_load_html_response)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890731A (ja) * 1981-11-25 1983-05-30 Sony Corp 感光性高分子膜形成用プラズマ処理装置
JPS58122736A (ja) * 1982-01-14 1983-07-21 Nippon Telegr & Teleph Corp <Ntt> 絶縁膜形成法
JPS6184836A (ja) * 1984-10-02 1986-04-30 Dainippon Screen Mfg Co Ltd 薄膜形成方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF ELECTROCHEMICAL SOCIETY=1966 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5890731A (ja) * 1981-11-25 1983-05-30 Sony Corp 感光性高分子膜形成用プラズマ処理装置
JPS58122736A (ja) * 1982-01-14 1983-07-21 Nippon Telegr & Teleph Corp <Ntt> 絶縁膜形成法
JPS6184836A (ja) * 1984-10-02 1986-04-30 Dainippon Screen Mfg Co Ltd 薄膜形成方法

Also Published As

Publication number Publication date
JPS587058B2 (ja) 1983-02-08

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