JPS518898Y1 - - Google Patents

Info

Publication number
JPS518898Y1
JPS518898Y1 JP9620369U JP9620369U JPS518898Y1 JP S518898 Y1 JPS518898 Y1 JP S518898Y1 JP 9620369 U JP9620369 U JP 9620369U JP 9620369 U JP9620369 U JP 9620369U JP S518898 Y1 JPS518898 Y1 JP S518898Y1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9620369U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9620369U priority Critical patent/JPS518898Y1/ja
Publication of JPS518898Y1 publication Critical patent/JPS518898Y1/ja
Expired legal-status Critical Current

Links

Landscapes

  • Transmission Devices (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP9620369U 1969-10-11 1969-10-11 Expired JPS518898Y1 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9620369U JPS518898Y1 (enrdf_load_stackoverflow) 1969-10-11 1969-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9620369U JPS518898Y1 (enrdf_load_stackoverflow) 1969-10-11 1969-10-11

Publications (1)

Publication Number Publication Date
JPS518898Y1 true JPS518898Y1 (enrdf_load_stackoverflow) 1976-03-09

Family

ID=33074460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9620369U Expired JPS518898Y1 (enrdf_load_stackoverflow) 1969-10-11 1969-10-11

Country Status (1)

Country Link
JP (1) JPS518898Y1 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055380A (ja) * 2006-09-01 2008-03-13 Shingo Hatanaka エアフィルタユニットの洗浄装置
CN114752976A (zh) * 2021-05-31 2022-07-15 株式会社荏原制作所 预湿模块、脱气液循环系统和预湿方法
JP2022184678A (ja) * 2021-05-31 2022-12-13 株式会社荏原製作所 プリウェットモジュール、脱気液循環システム、およびプリウェット方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008055380A (ja) * 2006-09-01 2008-03-13 Shingo Hatanaka エアフィルタユニットの洗浄装置
CN114752976A (zh) * 2021-05-31 2022-07-15 株式会社荏原制作所 预湿模块、脱气液循环系统和预湿方法
WO2022254485A1 (ja) * 2021-05-31 2022-12-08 株式会社荏原製作所 プリウェットモジュール、およびプリウェット方法
JPWO2022254485A1 (enrdf_load_stackoverflow) * 2021-05-31 2022-12-08
JP2022184678A (ja) * 2021-05-31 2022-12-13 株式会社荏原製作所 プリウェットモジュール、脱気液循環システム、およびプリウェット方法
US11833551B2 (en) 2021-05-31 2023-12-05 Ebara Corporation Pre-wet module, deaerated liquid circulation system, and pre-wet method
US12076760B2 (en) 2021-05-31 2024-09-03 Ebara Corporation Pre-wet module, deaerated liquid circulation system, and pre-wet method

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