JPS5187180A - Tokunishinkujochakusetsubiniokerukadojohatsusochinodenshibiimutenkosochi - Google Patents

Tokunishinkujochakusetsubiniokerukadojohatsusochinodenshibiimutenkosochi

Info

Publication number
JPS5187180A
JPS5187180A JP50148339A JP14833975A JPS5187180A JP S5187180 A JPS5187180 A JP S5187180A JP 50148339 A JP50148339 A JP 50148339A JP 14833975 A JP14833975 A JP 14833975A JP S5187180 A JPS5187180 A JP S5187180A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50148339A
Other languages
English (en)
Japanese (ja)
Inventor
Gyuntaa Roberuto
Ieeshu Gyuntaa
Sandonaa Anton
Erupukamu Borufugangu
Gesuke Geruharudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BANTOSHUTAARU KONBINAATO HERUM
FUORUKUSUAIGUNAA BETORIIPU BANTOSHUTAARU KONBINAATO HERUMAN MATSUTERUN
Original Assignee
BANTOSHUTAARU KONBINAATO HERUM
FUORUKUSUAIGUNAA BETORIIPU BANTOSHUTAARU KONBINAATO HERUMAN MATSUTERUN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BANTOSHUTAARU KONBINAATO HERUM, FUORUKUSUAIGUNAA BETORIIPU BANTOSHUTAARU KONBINAATO HERUMAN MATSUTERUN filed Critical BANTOSHUTAARU KONBINAATO HERUM
Publication of JPS5187180A publication Critical patent/JPS5187180A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Toxicology (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP50148339A 1974-12-24 1975-12-12 Tokunishinkujochakusetsubiniokerukadojohatsusochinodenshibiimutenkosochi Pending JPS5187180A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18340974A DD120729A1 (enrdf_load_stackoverflow) 1974-12-24 1974-12-24

Publications (1)

Publication Number Publication Date
JPS5187180A true JPS5187180A (en) 1976-07-30

Family

ID=5498701

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50148339A Pending JPS5187180A (en) 1974-12-24 1975-12-12 Tokunishinkujochakusetsubiniokerukadojohatsusochinodenshibiimutenkosochi

Country Status (7)

Country Link
JP (1) JPS5187180A (enrdf_load_stackoverflow)
BE (1) BE837062A (enrdf_load_stackoverflow)
DD (1) DD120729A1 (enrdf_load_stackoverflow)
DE (1) DE2546902A1 (enrdf_load_stackoverflow)
IT (1) IT1048044B (enrdf_load_stackoverflow)
LU (1) LU74084A1 (enrdf_load_stackoverflow)
SU (1) SU636709A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624862A (ja) * 1985-06-29 1987-01-10 Anelva Corp 真空蒸着用電子銃

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS624862A (ja) * 1985-06-29 1987-01-10 Anelva Corp 真空蒸着用電子銃

Also Published As

Publication number Publication date
DE2546902A1 (de) 1976-07-08
SU636709A1 (ru) 1978-12-05
BE837062A (fr) 1976-04-16
DD120729A1 (enrdf_load_stackoverflow) 1976-06-20
LU74084A1 (enrdf_load_stackoverflow) 1976-07-20
IT1048044B (it) 1980-11-20

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