JPS5177060A - DENSHIKENBIKYODENSHIKYOKYUGEN OYOBI KEISEIHOHO - Google Patents

DENSHIKENBIKYODENSHIKYOKYUGEN OYOBI KEISEIHOHO

Info

Publication number
JPS5177060A
JPS5177060A JP14104275A JP14104275A JPS5177060A JP S5177060 A JPS5177060 A JP S5177060A JP 14104275 A JP14104275 A JP 14104275A JP 14104275 A JP14104275 A JP 14104275A JP S5177060 A JPS5177060 A JP S5177060A
Authority
JP
Japan
Prior art keywords
keiseihoho
denshikenbikyodenshikyokyugen
oyobi
oyobi keiseihoho
denshikenbikyodenshikyokyugen oyobi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14104275A
Other languages
Japanese (ja)
Other versions
JPS607335B2 (en
Inventor
Enu Ramachandoran Kobirubira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canadian Patents and Development Ltd
Original Assignee
Canadian Patents and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canadian Patents and Development Ltd filed Critical Canadian Patents and Development Ltd
Publication of JPS5177060A publication Critical patent/JPS5177060A/en
Publication of JPS607335B2 publication Critical patent/JPS607335B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
JP50141042A 1974-11-29 1975-11-25 thermionic emission cathode Expired JPS607335B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52850974A 1974-11-29 1974-11-29
XX528509 1974-11-29

Publications (2)

Publication Number Publication Date
JPS5177060A true JPS5177060A (en) 1976-07-03
JPS607335B2 JPS607335B2 (en) 1985-02-23

Family

ID=24105966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50141042A Expired JPS607335B2 (en) 1974-11-29 1975-11-25 thermionic emission cathode

Country Status (2)

Country Link
JP (1) JPS607335B2 (en)
DE (1) DE2553047A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH617793A5 (en) * 1977-09-02 1980-06-13 Balzers Hochvakuum
CH672860A5 (en) * 1986-09-29 1989-12-29 Balzers Hochvakuum
DE102011013262A1 (en) 2011-03-07 2012-09-13 Adlantis Dortmund Gmbh Electron-ionization source has photoelectrons that are generated from atmospheric-stable layer by ultra-violet source and are actuated with distance of acceleration in dimension of average free path length of gas
GB2583359A (en) * 2019-04-25 2020-10-28 Aquasium Tech Limited Electron beam emitting assembly

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3668457A (en) * 1969-08-25 1972-06-06 United Aircraft Corp Brazing alloy for bonding thermionic cathode to support
JPS4944061A (en) * 1972-09-02 1974-04-25
JPS4944662A (en) * 1972-05-30 1974-04-26

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3668457A (en) * 1969-08-25 1972-06-06 United Aircraft Corp Brazing alloy for bonding thermionic cathode to support
JPS4944662A (en) * 1972-05-30 1974-04-26
JPS4944061A (en) * 1972-09-02 1974-04-25

Also Published As

Publication number Publication date
JPS607335B2 (en) 1985-02-23
DE2553047A1 (en) 1976-06-10

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