JPS5173880A - - Google Patents
Info
- Publication number
- JPS5173880A JPS5173880A JP50137864A JP13786475A JPS5173880A JP S5173880 A JPS5173880 A JP S5173880A JP 50137864 A JP50137864 A JP 50137864A JP 13786475 A JP13786475 A JP 13786475A JP S5173880 A JPS5173880 A JP S5173880A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Holo Graphy (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19742454750 DE2454750C3 (de) | 1974-11-19 | 1974-11-19 | Verfahren und Anordnung zur Herstellung von Bildmustern für Masken integrierter Schaltkreise mittels aberrationsfreier Bildpunkte von Punkthologrammen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5173880A true JPS5173880A (enExample) | 1976-06-26 |
Family
ID=5931206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50137864A Pending JPS5173880A (enExample) | 1974-11-19 | 1975-11-18 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5173880A (enExample) |
| DE (1) | DE2454750C3 (enExample) |
| FR (1) | FR2292244A1 (enExample) |
| GB (1) | GB1532655A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3175124D1 (en) * | 1981-11-04 | 1986-09-18 | Deere John | Noise suppression device for a combustion engine, especially for public-works and agricultural engines, and machines equipped with such a device |
| DE69432092D1 (de) * | 1993-05-24 | 2003-03-13 | Holtronic Technologies Plc Lon | Vorrichtung und Verfahren zur Veränderung des Massstabs eines gedruckten Musters |
| GB2293459B (en) * | 1994-09-22 | 1997-10-01 | Holtronic Technologies Ltd | Method for printing of a pattern of features |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1522525C3 (de) * | 1965-12-06 | 1975-01-16 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen einer Photolackmaske |
-
1974
- 1974-11-19 DE DE19742454750 patent/DE2454750C3/de not_active Expired
-
1975
- 1975-11-14 GB GB4704675A patent/GB1532655A/en not_active Expired
- 1975-11-18 JP JP50137864A patent/JPS5173880A/ja active Pending
- 1975-11-18 FR FR7535176A patent/FR2292244A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| DE2454750B2 (de) | 1981-02-26 |
| FR2292244A1 (fr) | 1976-06-18 |
| GB1532655A (en) | 1978-11-15 |
| DE2454750A1 (de) | 1976-05-26 |
| FR2292244B1 (enExample) | 1979-10-12 |
| DE2454750C3 (de) | 1982-03-18 |