GB1532655A - Making mask-patterns - Google Patents

Making mask-patterns

Info

Publication number
GB1532655A
GB1532655A GB4704675A GB4704675A GB1532655A GB 1532655 A GB1532655 A GB 1532655A GB 4704675 A GB4704675 A GB 4704675A GB 4704675 A GB4704675 A GB 4704675A GB 1532655 A GB1532655 A GB 1532655A
Authority
GB
United Kingdom
Prior art keywords
point
nov
patterns
making mask
point images
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4704675A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1532655A publication Critical patent/GB1532655A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Holo Graphy (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB4704675A 1974-11-19 1975-11-14 Making mask-patterns Expired GB1532655A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742454750 DE2454750C3 (de) 1974-11-19 1974-11-19 Verfahren und Anordnung zur Herstellung von Bildmustern für Masken integrierter Schaltkreise mittels aberrationsfreier Bildpunkte von Punkthologrammen

Publications (1)

Publication Number Publication Date
GB1532655A true GB1532655A (en) 1978-11-15

Family

ID=5931206

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4704675A Expired GB1532655A (en) 1974-11-19 1975-11-14 Making mask-patterns

Country Status (4)

Country Link
JP (1) JPS5173880A (enExample)
DE (1) DE2454750C3 (enExample)
FR (1) FR2292244A1 (enExample)
GB (1) GB1532655A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2293459A (en) * 1994-09-22 1996-03-27 Holtronic Technologies Ltd Method for printing of a pattern of features
US5695894A (en) * 1993-05-24 1997-12-09 Holtronic Technologies Ltd. Method and apparatus for changing the scale of a pattern printed from a total internal reflection hologram

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE21436T1 (de) * 1981-11-04 1986-08-15 Deere John Geraeuschdaempfende einrichtung fuer brennkraftmaschinen, speziell bei maschinen fuer den innerstaedtischen und landwirtschaftlichen einsatz, und maschinen mit einer solchen einrichtung.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1522525C3 (de) * 1965-12-06 1975-01-16 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zum Herstellen einer Photolackmaske

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5695894A (en) * 1993-05-24 1997-12-09 Holtronic Technologies Ltd. Method and apparatus for changing the scale of a pattern printed from a total internal reflection hologram
GB2293459A (en) * 1994-09-22 1996-03-27 Holtronic Technologies Ltd Method for printing of a pattern of features
GB2293459B (en) * 1994-09-22 1997-10-01 Holtronic Technologies Ltd Method for printing of a pattern of features

Also Published As

Publication number Publication date
FR2292244A1 (fr) 1976-06-18
JPS5173880A (enExample) 1976-06-26
DE2454750B2 (de) 1981-02-26
FR2292244B1 (enExample) 1979-10-12
DE2454750C3 (de) 1982-03-18
DE2454750A1 (de) 1976-05-26

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee