JPS5168771A - Heterokozohandotaino sentakufushokuhoho - Google Patents

Heterokozohandotaino sentakufushokuhoho

Info

Publication number
JPS5168771A
JPS5168771A JP49142688A JP14268874A JPS5168771A JP S5168771 A JPS5168771 A JP S5168771A JP 49142688 A JP49142688 A JP 49142688A JP 14268874 A JP14268874 A JP 14268874A JP S5168771 A JPS5168771 A JP S5168771A
Authority
JP
Japan
Prior art keywords
sentakufushokuhoho
heterokozohandotaino
heterokozohandotaino sentakufushokuhoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49142688A
Other languages
English (en)
Japanese (ja)
Other versions
JPS579490B2 (enrdf_load_stackoverflow
Inventor
Kunihiko Asahi
Shotaro Umebachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP49142688A priority Critical patent/JPS5168771A/ja
Publication of JPS5168771A publication Critical patent/JPS5168771A/ja
Publication of JPS579490B2 publication Critical patent/JPS579490B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)
JP49142688A 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho Granted JPS5168771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49142688A JPS5168771A (en) 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49142688A JPS5168771A (en) 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho

Publications (2)

Publication Number Publication Date
JPS5168771A true JPS5168771A (en) 1976-06-14
JPS579490B2 JPS579490B2 (enrdf_load_stackoverflow) 1982-02-22

Family

ID=15321203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49142688A Granted JPS5168771A (en) 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho

Country Status (1)

Country Link
JP (1) JPS5168771A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743428A (en) * 1980-08-28 1982-03-11 Nec Corp Mesa etching method
JPS5969934A (ja) * 1982-10-14 1984-04-20 Sanyo Electric Co Ltd エツチング方法
JPS63146472A (ja) * 1981-11-23 1988-06-18 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 半導体構造体の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61175384U (enrdf_load_stackoverflow) * 1985-04-19 1986-10-31

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829372A (enrdf_load_stackoverflow) * 1971-08-18 1973-04-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829372A (enrdf_load_stackoverflow) * 1971-08-18 1973-04-18

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743428A (en) * 1980-08-28 1982-03-11 Nec Corp Mesa etching method
JPS63146472A (ja) * 1981-11-23 1988-06-18 インターナシヨナル・ビジネス・マシーンズ・コーポレーシヨン 半導体構造体の製造方法
JPS5969934A (ja) * 1982-10-14 1984-04-20 Sanyo Electric Co Ltd エツチング方法

Also Published As

Publication number Publication date
JPS579490B2 (enrdf_load_stackoverflow) 1982-02-22

Similar Documents

Publication Publication Date Title
DK137036C (enrdf_load_stackoverflow)
FR2259068B1 (enrdf_load_stackoverflow)
FR2258638B1 (enrdf_load_stackoverflow)
FI751327A7 (enrdf_load_stackoverflow)
JPS5168771A (enrdf_load_stackoverflow)
FR2259050B1 (enrdf_load_stackoverflow)
FR2258389B1 (enrdf_load_stackoverflow)
DK139711C (enrdf_load_stackoverflow)
JPS556398B2 (enrdf_load_stackoverflow)
CS173191B1 (enrdf_load_stackoverflow)
FI233974A7 (enrdf_load_stackoverflow)
BG20461A1 (enrdf_load_stackoverflow)
BG20062A1 (enrdf_load_stackoverflow)
DD111056A1 (enrdf_load_stackoverflow)
DD114785A1 (enrdf_load_stackoverflow)
CH597726A5 (enrdf_load_stackoverflow)
CH597134A5 (enrdf_load_stackoverflow)
CH589971A5 (enrdf_load_stackoverflow)
CH589884B5 (enrdf_load_stackoverflow)
CH588379A5 (enrdf_load_stackoverflow)
BG26841A1 (enrdf_load_stackoverflow)
BG22336A1 (enrdf_load_stackoverflow)
BG20481A1 (enrdf_load_stackoverflow)
BG20468A1 (enrdf_load_stackoverflow)
BG20033A1 (enrdf_load_stackoverflow)