JPS579490B2 - - Google Patents

Info

Publication number
JPS579490B2
JPS579490B2 JP14268874A JP14268874A JPS579490B2 JP S579490 B2 JPS579490 B2 JP S579490B2 JP 14268874 A JP14268874 A JP 14268874A JP 14268874 A JP14268874 A JP 14268874A JP S579490 B2 JPS579490 B2 JP S579490B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14268874A
Other languages
Japanese (ja)
Other versions
JPS5168771A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14268874A priority Critical patent/JPS5168771A/ja
Publication of JPS5168771A publication Critical patent/JPS5168771A/ja
Publication of JPS579490B2 publication Critical patent/JPS579490B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)
JP14268874A 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho Granted JPS5168771A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14268874A JPS5168771A (ja) 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14268874A JPS5168771A (ja) 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho

Publications (2)

Publication Number Publication Date
JPS5168771A JPS5168771A (ja) 1976-06-14
JPS579490B2 true JPS579490B2 (enrdf_load_stackoverflow) 1982-02-22

Family

ID=15321203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14268874A Granted JPS5168771A (ja) 1974-12-11 1974-12-11 Heterokozohandotaino sentakufushokuhoho

Country Status (1)

Country Link
JP (1) JPS5168771A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61175384U (enrdf_load_stackoverflow) * 1985-04-19 1986-10-31

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5743428A (en) * 1980-08-28 1982-03-11 Nec Corp Mesa etching method
US4460910A (en) * 1981-11-23 1984-07-17 International Business Machines Corporation Heterojunction semiconductor
JPS5969934A (ja) * 1982-10-14 1984-04-20 Sanyo Electric Co Ltd エツチング方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4829372A (enrdf_load_stackoverflow) * 1971-08-18 1973-04-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61175384U (enrdf_load_stackoverflow) * 1985-04-19 1986-10-31

Also Published As

Publication number Publication date
JPS5168771A (ja) 1976-06-14

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