JPS5161266A - - Google Patents

Info

Publication number
JPS5161266A
JPS5161266A JP50118208A JP11820875A JPS5161266A JP S5161266 A JPS5161266 A JP S5161266A JP 50118208 A JP50118208 A JP 50118208A JP 11820875 A JP11820875 A JP 11820875A JP S5161266 A JPS5161266 A JP S5161266A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50118208A
Other languages
Japanese (ja)
Other versions
JPS561776B2 (enExample
Inventor
Jii Furinto Aran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GCA Corp
Original Assignee
GCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GCA Corp filed Critical GCA Corp
Publication of JPS5161266A publication Critical patent/JPS5161266A/ja
Publication of JPS561776B2 publication Critical patent/JPS561776B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP11820875A 1974-09-30 1975-09-30 Expired JPS561776B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/510,284 US3960277A (en) 1974-09-30 1974-09-30 Mask plate handling apparatus

Publications (2)

Publication Number Publication Date
JPS5161266A true JPS5161266A (enExample) 1976-05-27
JPS561776B2 JPS561776B2 (enExample) 1981-01-16

Family

ID=24030128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11820875A Expired JPS561776B2 (enExample) 1974-09-30 1975-09-30

Country Status (5)

Country Link
US (1) US3960277A (enExample)
JP (1) JPS561776B2 (enExample)
DE (1) DE2542047C2 (enExample)
FR (1) FR2305369A1 (enExample)
GB (1) GB1482331A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186918A (en) * 1977-12-12 1980-02-05 International Business Machines Corporation Method and apparatus for locating and aligning flimsy sheets
WO1982001482A1 (en) * 1980-11-06 1982-05-13 Patent Versuch Censor Method and installation for the processing of the upper side of a flat part by means of a liquid
DE3219502C2 (de) * 1982-05-25 1990-04-19 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum automatischen Transport scheibenförmiger Objekte
US4778332A (en) * 1987-02-09 1988-10-18 The Perkin-Elmer Corporation Wafer flip apparatus
GB2250262B (en) * 1990-10-05 1995-01-11 Smc Kk Mechanism for locking angular movement of suction pad
DE4304301A1 (de) * 1993-02-12 1994-08-18 Suess Kg Karl Transportsystem und -verfahren für zueinander auszurichtende Objekte
DE29510320U1 (de) * 1995-06-26 1995-09-07 Rico-Maschinenbau Max Appel KG, 73431 Aalen Greifvorrichtung für Gläser, Dosen u.dgl. Behältnisse
DE19620234A1 (de) * 1996-05-20 1997-11-27 Holtronic Technologies Ltd Verfahren und Vorrichtung zum Positionieren eines Substrats
DE10161902B4 (de) * 2001-12-17 2005-06-23 Infineon Technologies Ag Verfahren und Vorrichtung zum Handhaben von Platten
EP3394881A1 (en) * 2017-03-17 2018-10-31 Applied Materials, Inc. Methods of handling a mask device in a vacuum system, mask handling apparatus, and vacuum system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL68949C (enExample) * 1940-12-24 1900-01-01
DE1761582U (de) * 1957-10-07 1958-02-13 Rose Brothers Ltd Zufuehrungsvorrichtung fuer faltschachteln.
US3260404A (en) * 1964-02-11 1966-07-12 Eastman Kodak Co Automatic parts supply arrangement
GB1137555A (en) * 1965-10-22 1968-12-27 Pilkington Brothers Ltd Improvements in or relating to the transporting of sheet materials
US3501026A (en) * 1968-02-06 1970-03-17 Package Machinery Co Article transfer apparatus for candy bars and the like
US3645581A (en) * 1968-11-26 1972-02-29 Ind Modular Systems Corp Apparatus and method for handling and treating articles
FR2121361B1 (enExample) * 1971-01-06 1976-05-28 Colgate Palmolive Co
US3718371A (en) * 1971-08-25 1973-02-27 Ind Modular Syst Corp Fluid bearing track structure and components thereof
US3797889A (en) * 1971-12-30 1974-03-19 Texas Instruments Inc Workpiece alignment system
US3865254A (en) * 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner

Also Published As

Publication number Publication date
US3960277A (en) 1976-06-01
JPS561776B2 (enExample) 1981-01-16
FR2305369A1 (fr) 1976-10-22
DE2542047C2 (de) 1981-09-24
GB1482331A (en) 1977-08-10
DE2542047A1 (de) 1976-04-08
FR2305369B1 (enExample) 1980-04-30

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