JPS5160453A - Shirikonsankamaku * sio2 * noanteikaho - Google Patents
Shirikonsankamaku * sio2 * noanteikahoInfo
- Publication number
- JPS5160453A JPS5160453A JP13366174A JP13366174A JPS5160453A JP S5160453 A JPS5160453 A JP S5160453A JP 13366174 A JP13366174 A JP 13366174A JP 13366174 A JP13366174 A JP 13366174A JP S5160453 A JPS5160453 A JP S5160453A
- Authority
- JP
- Japan
- Prior art keywords
- shirikonsankamaku
- noanteikaho
- sio2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13366174A JPS5160453A (en) | 1974-11-22 | 1974-11-22 | Shirikonsankamaku * sio2 * noanteikaho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13366174A JPS5160453A (en) | 1974-11-22 | 1974-11-22 | Shirikonsankamaku * sio2 * noanteikaho |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5160453A true JPS5160453A (en) | 1976-05-26 |
Family
ID=15109968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13366174A Pending JPS5160453A (en) | 1974-11-22 | 1974-11-22 | Shirikonsankamaku * sio2 * noanteikaho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5160453A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522862A (en) * | 1978-08-07 | 1980-02-18 | Nec Corp | Manufacturing method for silicon oxidized film |
JPS55162234A (en) * | 1979-06-05 | 1980-12-17 | Agency Of Ind Science & Technol | Manufacture of semiconductor device |
US4784975A (en) * | 1986-10-23 | 1988-11-15 | International Business Machines Corporation | Post-oxidation anneal of silicon dioxide |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4830710A (en) * | 1971-08-20 | 1973-04-23 |
-
1974
- 1974-11-22 JP JP13366174A patent/JPS5160453A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4830710A (en) * | 1971-08-20 | 1973-04-23 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522862A (en) * | 1978-08-07 | 1980-02-18 | Nec Corp | Manufacturing method for silicon oxidized film |
JPS6128213B2 (en) * | 1978-08-07 | 1986-06-28 | Nippon Electric Co | |
JPS55162234A (en) * | 1979-06-05 | 1980-12-17 | Agency Of Ind Science & Technol | Manufacture of semiconductor device |
US4784975A (en) * | 1986-10-23 | 1988-11-15 | International Business Machines Corporation | Post-oxidation anneal of silicon dioxide |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS512453A (en) | Ryutainoryuryooyobi * aruiha * nenseitokuseinosokuteisochi | |
JPS5129308A (en) | Richiumu * aruminiumugokinkaranarudenkyokunoseiho | |
JPS511600A (en) | Kayoseihori * jikuroruhosufuazen * jugotaino seizohoho | |
JPS5135317A (en) | Kirokuoyobi * matahasaiseisochioyobisonosochinimochiirukasetsuto | |
JPS5133716A (en) | * teitansokarushiumu iokeikaisakuko * | |
CS47275A2 (en) | Zarizeni k raseni hadicovych folii | |
JPS5130586A (en) | Shibosan * arukanooruaminshukugobutsuno ekijochoseibutsu | |
JPS5122698A (en) | Chitsusosankabutsu* nisankachitsusohenkansochi | |
JPS51105036A (en) | * ** | |
JPS5128543A (en) | Teisuiso * kojinseisenkoyosetsuyo furatsukusu | |
JPS5135490A (en) | * * * aresuroron no seizoho | |
JPS5115855A (en) | Zairyofunsai * kongoki | |
JPS5160453A (en) | Shirikonsankamaku * sio2 * noanteikaho | |
JPS519475A (en) | G kajusokuteishijisochi | |
JPS5122429A (en) | Hatsuko * rinko * kinoojusuru hotokuromitsukusoseibutsu | |
JPS5123008A (en) | Hooringu * kontenshontsushinhoshiki | |
JPS5136439A (en) | * purasumainasu * mentooru no kogakubunkatsuho | |
JPS5161695A (en) | Koseibutsushitsu no*kk73 no seizoho | |
JPS5120268A (en) | Taika * tainetsusei goseijushi | |
JPS5118983A (en) | Koatsusanso * suiso seizosochi | |
JPS5131069A (en) | * choonpanyoru ryukanruinonaigaimennofuchakufujunbutsuno bojosochi * | |
JPS5113715A (en) | Arufua*beeta fuhowakarubonsanno seizohoho | |
JPS5127795A (en) | * ritsutaitotsushitsushijikikonaizonoyukayohijojudoshomeiki * | |
JPS5111086A (en) | Ryukasuisooyobi * matahajukiiokagobutsuganjuhaigasuno datsushuhoho | |
JPS5119016A (en) | Taibakuretsuseino asubesuto * sementooshidashiseikeihinno seizoho |