JPS5160453A - Shirikonsankamaku * sio2 * noanteikaho - Google Patents

Shirikonsankamaku * sio2 * noanteikaho

Info

Publication number
JPS5160453A
JPS5160453A JP13366174A JP13366174A JPS5160453A JP S5160453 A JPS5160453 A JP S5160453A JP 13366174 A JP13366174 A JP 13366174A JP 13366174 A JP13366174 A JP 13366174A JP S5160453 A JPS5160453 A JP S5160453A
Authority
JP
Japan
Prior art keywords
shirikonsankamaku
noanteikaho
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13366174A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13366174A priority Critical patent/JPS5160453A/en
Publication of JPS5160453A publication Critical patent/JPS5160453A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP13366174A 1974-11-22 1974-11-22 Shirikonsankamaku * sio2 * noanteikaho Pending JPS5160453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13366174A JPS5160453A (en) 1974-11-22 1974-11-22 Shirikonsankamaku * sio2 * noanteikaho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13366174A JPS5160453A (en) 1974-11-22 1974-11-22 Shirikonsankamaku * sio2 * noanteikaho

Publications (1)

Publication Number Publication Date
JPS5160453A true JPS5160453A (en) 1976-05-26

Family

ID=15109968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13366174A Pending JPS5160453A (en) 1974-11-22 1974-11-22 Shirikonsankamaku * sio2 * noanteikaho

Country Status (1)

Country Link
JP (1) JPS5160453A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522862A (en) * 1978-08-07 1980-02-18 Nec Corp Manufacturing method for silicon oxidized film
JPS55162234A (en) * 1979-06-05 1980-12-17 Agency Of Ind Science & Technol Manufacture of semiconductor device
US4784975A (en) * 1986-10-23 1988-11-15 International Business Machines Corporation Post-oxidation anneal of silicon dioxide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830710A (en) * 1971-08-20 1973-04-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4830710A (en) * 1971-08-20 1973-04-23

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522862A (en) * 1978-08-07 1980-02-18 Nec Corp Manufacturing method for silicon oxidized film
JPS6128213B2 (en) * 1978-08-07 1986-06-28 Nippon Electric Co
JPS55162234A (en) * 1979-06-05 1980-12-17 Agency Of Ind Science & Technol Manufacture of semiconductor device
US4784975A (en) * 1986-10-23 1988-11-15 International Business Machines Corporation Post-oxidation anneal of silicon dioxide

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