JPS5151957A - Kogakushikihenikenshutsusochi - Google Patents

Kogakushikihenikenshutsusochi

Info

Publication number
JPS5151957A
JPS5151957A JP12584174A JP12584174A JPS5151957A JP S5151957 A JPS5151957 A JP S5151957A JP 12584174 A JP12584174 A JP 12584174A JP 12584174 A JP12584174 A JP 12584174A JP S5151957 A JPS5151957 A JP S5151957A
Authority
JP
Japan
Prior art keywords
kogakushiki
henikenshutsusochi
kogakushiki henikenshutsusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12584174A
Other languages
English (en)
Inventor
Etsushi Suzuki
Susumu Hashimoto
Chiaki Iwadare
Tomio Kashihara
Tsuyoshi Kodama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP12584174A priority Critical patent/JPS5151957A/ja
Publication of JPS5151957A publication Critical patent/JPS5151957A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP12584174A 1974-10-31 1974-10-31 Kogakushikihenikenshutsusochi Pending JPS5151957A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12584174A JPS5151957A (ja) 1974-10-31 1974-10-31 Kogakushikihenikenshutsusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12584174A JPS5151957A (ja) 1974-10-31 1974-10-31 Kogakushikihenikenshutsusochi

Publications (1)

Publication Number Publication Date
JPS5151957A true JPS5151957A (ja) 1976-05-07

Family

ID=14920256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12584174A Pending JPS5151957A (ja) 1974-10-31 1974-10-31 Kogakushikihenikenshutsusochi

Country Status (1)

Country Link
JP (1) JPS5151957A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05322561A (ja) * 1992-05-15 1993-12-07 Olympus Optical Co Ltd 焦点検出装置
JPH07229720A (ja) * 1994-02-21 1995-08-29 Nec Corp ３次元形状測定装置
JP2007101399A (ja) * 2005-10-05 2007-04-19 Nikon Corp 高さ測定装置および方法
JP2007536535A (ja) * 2004-05-06 2007-12-13 カール マール ホールディング ゲーエムベーハー 光プローブチップを有する測定装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3567320A (en) * 1968-12-23 1971-03-02 Optomechanisms Inc Non-contact optical measuring probe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3567320A (en) * 1968-12-23 1971-03-02 Optomechanisms Inc Non-contact optical measuring probe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05322561A (ja) * 1992-05-15 1993-12-07 Olympus Optical Co Ltd 焦点検出装置
JPH07229720A (ja) * 1994-02-21 1995-08-29 Nec Corp ３次元形状測定装置
JP2007536535A (ja) * 2004-05-06 2007-12-13 カール マール ホールディング ゲーエムベーハー 光プローブチップを有する測定装置
JP2007101399A (ja) * 2005-10-05 2007-04-19 Nikon Corp 高さ測定装置および方法

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