JPS5150066A - - Google Patents

Info

Publication number
JPS5150066A
JPS5150066A JP49123672A JP12367274A JPS5150066A JP S5150066 A JPS5150066 A JP S5150066A JP 49123672 A JP49123672 A JP 49123672A JP 12367274 A JP12367274 A JP 12367274A JP S5150066 A JPS5150066 A JP S5150066A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49123672A
Other languages
Japanese (ja)
Other versions
JPS5853927B2 (ja
Inventor
Hiroshi Hachiko
Shiro Yamada
Shozaburo Kida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOYOBO ENG CO Ltd
TOYOBO ENJINIARINGU KK
Original Assignee
TOYOBO ENG CO Ltd
TOYOBO ENJINIARINGU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOYOBO ENG CO Ltd, TOYOBO ENJINIARINGU KK filed Critical TOYOBO ENG CO Ltd
Priority to JP49123672A priority Critical patent/JPS5853927B2/ja
Publication of JPS5150066A publication Critical patent/JPS5150066A/ja
Publication of JPS5853927B2 publication Critical patent/JPS5853927B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP49123672A 1974-10-26 1974-10-26 クウキジヨジンソウチ Expired JPS5853927B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49123672A JPS5853927B2 (ja) 1974-10-26 1974-10-26 クウキジヨジンソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49123672A JPS5853927B2 (ja) 1974-10-26 1974-10-26 クウキジヨジンソウチ

Publications (2)

Publication Number Publication Date
JPS5150066A true JPS5150066A (enrdf_load_stackoverflow) 1976-05-01
JPS5853927B2 JPS5853927B2 (ja) 1983-12-02

Family

ID=14866428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49123672A Expired JPS5853927B2 (ja) 1974-10-26 1974-10-26 クウキジヨジンソウチ

Country Status (1)

Country Link
JP (1) JPS5853927B2 (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365978U (enrdf_load_stackoverflow) * 1976-11-08 1978-06-02
WO2007066691A1 (ja) * 2005-12-06 2007-06-14 Toshiba Carrier Corporation 空気調和機
JP2007155241A (ja) * 2005-12-06 2007-06-21 Toshiba Kyaria Kk 空気調和機の室内機
JP2007155240A (ja) * 2005-12-06 2007-06-21 Toshiba Kyaria Kk 空気調和機の室内機
JP2007155239A (ja) * 2005-12-06 2007-06-21 Toshiba Kyaria Kk 空気調和機の室内機
JP2007205670A (ja) * 2006-02-03 2007-08-16 Toshiba Kyaria Kk 空気調和機の室内機
JP2008145074A (ja) * 2006-12-12 2008-06-26 Toshiba Kyaria Kk 空気調和機の室内機
WO2009038326A3 (en) * 2007-09-21 2009-05-07 Piezonics Co Ltd Scrubber using mesh filter and apparatus for exhaust gas treatment in semiconductor fabrication equipments using the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4119183Y1 (enrdf_load_stackoverflow) * 1964-03-03 1966-09-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4119183Y1 (enrdf_load_stackoverflow) * 1964-03-03 1966-09-07

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5365978U (enrdf_load_stackoverflow) * 1976-11-08 1978-06-02
WO2007066691A1 (ja) * 2005-12-06 2007-06-14 Toshiba Carrier Corporation 空気調和機
JP2007155241A (ja) * 2005-12-06 2007-06-21 Toshiba Kyaria Kk 空気調和機の室内機
JP2007155240A (ja) * 2005-12-06 2007-06-21 Toshiba Kyaria Kk 空気調和機の室内機
JP2007155239A (ja) * 2005-12-06 2007-06-21 Toshiba Kyaria Kk 空気調和機の室内機
JPWO2007066691A1 (ja) * 2005-12-06 2009-05-21 東芝キヤリア株式会社 空気調和機
JP4815452B2 (ja) * 2005-12-06 2011-11-16 東芝キヤリア株式会社 空気調和機
JP2007205670A (ja) * 2006-02-03 2007-08-16 Toshiba Kyaria Kk 空気調和機の室内機
JP2008145074A (ja) * 2006-12-12 2008-06-26 Toshiba Kyaria Kk 空気調和機の室内機
WO2009038326A3 (en) * 2007-09-21 2009-05-07 Piezonics Co Ltd Scrubber using mesh filter and apparatus for exhaust gas treatment in semiconductor fabrication equipments using the same

Also Published As

Publication number Publication date
JPS5853927B2 (ja) 1983-12-02

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