JPS5149421B2 - - Google Patents
Info
- Publication number
- JPS5149421B2 JPS5149421B2 JP7351972A JP7351972A JPS5149421B2 JP S5149421 B2 JPS5149421 B2 JP S5149421B2 JP 7351972 A JP7351972 A JP 7351972A JP 7351972 A JP7351972 A JP 7351972A JP S5149421 B2 JPS5149421 B2 JP S5149421B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7351972A JPS5149421B2 (xx) | 1972-07-24 | 1972-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7351972A JPS5149421B2 (xx) | 1972-07-24 | 1972-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4934850A JPS4934850A (xx) | 1974-03-30 |
| JPS5149421B2 true JPS5149421B2 (xx) | 1976-12-27 |
Family
ID=13520560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7351972A Expired JPS5149421B2 (xx) | 1972-07-24 | 1972-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5149421B2 (xx) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3961318A (en) * | 1975-01-17 | 1976-06-01 | Inductosyn Corporation | Electrostatic position-measuring transducer |
| JPS5373154A (en) * | 1976-12-10 | 1978-06-29 | Mitsutoyo Seisakusho | Electrostatic capacity type displacement detector |
| JPS5913152Y2 (ja) * | 1977-05-18 | 1984-04-19 | いすゞ自動車株式会社 | □／フアイナルピニオンシヤフト先端部の軸受支持部の構造□／ |
| JPS5429009U (xx) * | 1977-07-29 | 1979-02-26 | ||
| NL7905562A (nl) * | 1979-07-17 | 1981-01-20 | Heerens Willem Christiaan | Capacitieve meter. |
| US4404560A (en) * | 1981-05-07 | 1983-09-13 | International Business Machines Corporation | Capacitive transducer for providing precise angular positional information |
| ES2028421T3 (es) * | 1988-08-11 | 1992-07-01 | Siemens Aktiengesellschaft | Preceptor del valor medido para variaciones de longitud o de distancia, especialmente para la medicion sin contacto fisico de momentos de giro en arboles rotativos. |
| JP5171395B2 (ja) * | 2007-07-31 | 2013-03-27 | 京セラ株式会社 | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| JP5153457B2 (ja) * | 2008-05-29 | 2013-02-27 | 京セラ株式会社 | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| WO2010023766A1 (ja) * | 2008-09-01 | 2010-03-04 | パイオニア株式会社 | 変位センサ |
| WO2010023767A1 (ja) * | 2008-09-01 | 2010-03-04 | パイオニア株式会社 | 変位センサ |
-
1972
- 1972-07-24 JP JP7351972A patent/JPS5149421B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4934850A (xx) | 1974-03-30 |