JPS5149421B2 - - Google Patents

Info

Publication number
JPS5149421B2
JPS5149421B2 JP7351972A JP7351972A JPS5149421B2 JP S5149421 B2 JPS5149421 B2 JP S5149421B2 JP 7351972 A JP7351972 A JP 7351972A JP 7351972 A JP7351972 A JP 7351972A JP S5149421 B2 JPS5149421 B2 JP S5149421B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7351972A
Other languages
Japanese (ja)
Other versions
JPS4934850A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7351972A priority Critical patent/JPS5149421B2/ja
Publication of JPS4934850A publication Critical patent/JPS4934850A/ja
Publication of JPS5149421B2 publication Critical patent/JPS5149421B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Linear Or Angular Velocity Measurement And Their Indicating Devices (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP7351972A 1972-07-24 1972-07-24 Expired JPS5149421B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7351972A JPS5149421B2 (enrdf_load_stackoverflow) 1972-07-24 1972-07-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7351972A JPS5149421B2 (enrdf_load_stackoverflow) 1972-07-24 1972-07-24

Publications (2)

Publication Number Publication Date
JPS4934850A JPS4934850A (enrdf_load_stackoverflow) 1974-03-30
JPS5149421B2 true JPS5149421B2 (enrdf_load_stackoverflow) 1976-12-27

Family

ID=13520560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7351972A Expired JPS5149421B2 (enrdf_load_stackoverflow) 1972-07-24 1972-07-24

Country Status (1)

Country Link
JP (1) JPS5149421B2 (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3961318A (en) * 1975-01-17 1976-06-01 Inductosyn Corporation Electrostatic position-measuring transducer
JPS5373154A (en) * 1976-12-10 1978-06-29 Mitsutoyo Seisakusho Electrostatic capacity type displacement detector
JPS5913152Y2 (ja) * 1977-05-18 1984-04-19 いすゞ自動車株式会社 □／フアイナルピニオンシヤフト先端部の軸受支持部の構造□／
JPS5429009U (enrdf_load_stackoverflow) * 1977-07-29 1979-02-26
NL7905562A (nl) * 1979-07-17 1981-01-20 Heerens Willem Christiaan Capacitieve meter.
US4404560A (en) * 1981-05-07 1983-09-13 International Business Machines Corporation Capacitive transducer for providing precise angular positional information
ES2028421T3 (es) * 1988-08-11 1992-07-01 Siemens Aktiengesellschaft Preceptor del valor medido para variaciones de longitud o de distancia, especialmente para la medicion sin contacto fisico de momentos de giro en arboles rotativos.
JP5171395B2 (ja) * 2007-07-31 2013-03-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
JP5153457B2 (ja) * 2008-05-29 2013-02-27 京セラ株式会社 ステージの位置変動検出装置およびこれを備えた搬送装置
WO2010023766A1 (ja) * 2008-09-01 2010-03-04 パイオニア株式会社 変位センサ
WO2010023767A1 (ja) * 2008-09-01 2010-03-04 パイオニア株式会社 変位センサ

Also Published As

Publication number Publication date
JPS4934850A (enrdf_load_stackoverflow) 1974-03-30

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