JPS5147592B2 - - Google Patents
Info
- Publication number
- JPS5147592B2 JPS5147592B2 JP47127853A JP12785372A JPS5147592B2 JP S5147592 B2 JPS5147592 B2 JP S5147592B2 JP 47127853 A JP47127853 A JP 47127853A JP 12785372 A JP12785372 A JP 12785372A JP S5147592 B2 JPS5147592 B2 JP S5147592B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47127853A JPS5147592B2 (https=) | 1972-12-19 | 1972-12-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47127853A JPS5147592B2 (https=) | 1972-12-19 | 1972-12-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4984587A JPS4984587A (https=) | 1974-08-14 |
| JPS5147592B2 true JPS5147592B2 (https=) | 1976-12-15 |
Family
ID=14970273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47127853A Expired JPS5147592B2 (https=) | 1972-12-19 | 1972-12-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147592B2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50122887A (https=) * | 1974-03-13 | 1975-09-26 | ||
| JPS50141980A (https=) * | 1974-05-02 | 1975-11-15 | ||
| JPS6011471B2 (ja) * | 1974-12-10 | 1985-03-26 | 日本電気株式会社 | 半導体装置 |
| JPS51118380A (en) * | 1975-04-10 | 1976-10-18 | Mitsubishi Electric Corp | Manufacturing process for ic |
| US4617071A (en) * | 1981-10-27 | 1986-10-14 | Fairchild Semiconductor Corporation | Method of fabricating electrically connected regions of opposite conductivity type in a semiconductor structure |
| JPS5972165A (ja) * | 1983-09-05 | 1984-04-24 | Hitachi Ltd | 半導体装置 |
| JPS61204962A (ja) * | 1985-03-08 | 1986-09-11 | Seiko Instr & Electronics Ltd | Ｃｍｏｓの製造方法 |
| JPS61190974A (ja) * | 1985-11-22 | 1986-08-25 | Nec Corp | 相補型ｍｉｓ電界効果半導体装置 |
| JPH02156831A (ja) * | 1988-12-12 | 1990-06-15 | Freunt Ind Co Ltd | 粉衣および単離方法および装置 |
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1972
- 1972-12-19 JP JP47127853A patent/JPS5147592B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4984587A (https=) | 1974-08-14 |