JPS5146441B2 - - Google Patents
Info
- Publication number
- JPS5146441B2 JPS5146441B2 JP7026273A JP7026273A JPS5146441B2 JP S5146441 B2 JPS5146441 B2 JP S5146441B2 JP 7026273 A JP7026273 A JP 7026273A JP 7026273 A JP7026273 A JP 7026273A JP S5146441 B2 JPS5146441 B2 JP S5146441B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7026273A JPS5146441B2 (ja) | 1973-06-20 | 1973-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7026273A JPS5146441B2 (ja) | 1973-06-20 | 1973-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5019840A JPS5019840A (ja) | 1975-03-03 |
| JPS5146441B2 true JPS5146441B2 (ja) | 1976-12-09 |
Family
ID=13426433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7026273A Expired JPS5146441B2 (ja) | 1973-06-20 | 1973-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146441B2 (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59103344A (ja) * | 1983-09-19 | 1984-06-14 | Hitachi Ltd | 液体スプレー装置 |
| JPS62125878A (ja) * | 1985-11-25 | 1987-06-08 | Mitsubishi Rayon Co Ltd | 塗膜硬化法 |
| JPH02191328A (ja) * | 1989-12-25 | 1990-07-27 | Hitachi Ltd | ウエハへの液体供給方法 |
-
1973
- 1973-06-20 JP JP7026273A patent/JPS5146441B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5019840A (ja) | 1975-03-03 |