JPS5019840A - - Google Patents

Info

Publication number
JPS5019840A
JPS5019840A JP7026273A JP7026273A JPS5019840A JP S5019840 A JPS5019840 A JP S5019840A JP 7026273 A JP7026273 A JP 7026273A JP 7026273 A JP7026273 A JP 7026273A JP S5019840 A JPS5019840 A JP S5019840A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7026273A
Other versions
JPS5146441B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7026273A priority Critical patent/JPS5146441B2/ja
Publication of JPS5019840A publication Critical patent/JPS5019840A/ja
Publication of JPS5146441B2 publication Critical patent/JPS5146441B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP7026273A 1973-06-20 1973-06-20 Expired JPS5146441B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7026273A JPS5146441B2 (ja) 1973-06-20 1973-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7026273A JPS5146441B2 (ja) 1973-06-20 1973-06-20

Publications (2)

Publication Number Publication Date
JPS5019840A true JPS5019840A (ja) 1975-03-03
JPS5146441B2 JPS5146441B2 (ja) 1976-12-09

Family

ID=13426433

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7026273A Expired JPS5146441B2 (ja) 1973-06-20 1973-06-20

Country Status (1)

Country Link
JP (1) JPS5146441B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103344A (ja) * 1983-09-19 1984-06-14 Hitachi Ltd 液体スプレー装置
JPS62125878A (ja) * 1985-11-25 1987-06-08 Mitsubishi Rayon Co Ltd 塗膜硬化法
JPH02191328A (ja) * 1989-12-25 1990-07-27 Hitachi Ltd ウエハへの液体供給方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103344A (ja) * 1983-09-19 1984-06-14 Hitachi Ltd 液体スプレー装置
JPS62125878A (ja) * 1985-11-25 1987-06-08 Mitsubishi Rayon Co Ltd 塗膜硬化法
JPH02191328A (ja) * 1989-12-25 1990-07-27 Hitachi Ltd ウエハへの液体供給方法

Also Published As

Publication number Publication date
JPS5146441B2 (ja) 1976-12-09

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