JPS5145010Y2 - - Google Patents
Info
- Publication number
- JPS5145010Y2 JPS5145010Y2 JP1973061237U JP6123773U JPS5145010Y2 JP S5145010 Y2 JPS5145010 Y2 JP S5145010Y2 JP 1973061237 U JP1973061237 U JP 1973061237U JP 6123773 U JP6123773 U JP 6123773U JP S5145010 Y2 JPS5145010 Y2 JP S5145010Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973061237U JPS5145010Y2 (en) | 1973-05-26 | 1973-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1973061237U JPS5145010Y2 (en) | 1973-05-26 | 1973-05-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5011175U JPS5011175U (en) | 1975-02-05 |
| JPS5145010Y2 true JPS5145010Y2 (en) | 1976-11-01 |
Family
ID=28221603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1973061237U Expired JPS5145010Y2 (en) | 1973-05-26 | 1973-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5145010Y2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5653869Y2 (en) * | 1977-02-03 | 1981-12-15 | ||
| JP6426388B2 (en) * | 2014-07-17 | 2018-11-21 | 芝浦メカトロニクス株式会社 | Resist stripping solution cleaning apparatus and substrate processing apparatus |
-
1973
- 1973-05-26 JP JP1973061237U patent/JPS5145010Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5011175U (en) | 1975-02-05 |