JPS5141953A - Fujunbutsunodobunpusokuteihoho - Google Patents

Fujunbutsunodobunpusokuteihoho

Info

Publication number
JPS5141953A
JPS5141953A JP11535474A JP11535474A JPS5141953A JP S5141953 A JPS5141953 A JP S5141953A JP 11535474 A JP11535474 A JP 11535474A JP 11535474 A JP11535474 A JP 11535474A JP S5141953 A JPS5141953 A JP S5141953A
Authority
JP
Japan
Prior art keywords
fujunbutsunodobunpusokuteihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11535474A
Other languages
English (en)
Inventor
Takashi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatsu Electric Co Ltd
Iwasaki Tsushinki KK
Original Assignee
Iwatsu Electric Co Ltd
Iwasaki Tsushinki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatsu Electric Co Ltd, Iwasaki Tsushinki KK filed Critical Iwatsu Electric Co Ltd
Priority to JP11535474A priority Critical patent/JPS5141953A/ja
Publication of JPS5141953A publication Critical patent/JPS5141953A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP11535474A 1974-10-07 1974-10-07 Fujunbutsunodobunpusokuteihoho Pending JPS5141953A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11535474A JPS5141953A (ja) 1974-10-07 1974-10-07 Fujunbutsunodobunpusokuteihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11535474A JPS5141953A (ja) 1974-10-07 1974-10-07 Fujunbutsunodobunpusokuteihoho

Publications (1)

Publication Number Publication Date
JPS5141953A true JPS5141953A (ja) 1976-04-08

Family

ID=14660439

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11535474A Pending JPS5141953A (ja) 1974-10-07 1974-10-07 Fujunbutsunodobunpusokuteihoho

Country Status (1)

Country Link
JP (1) JPS5141953A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01187826A (ja) * 1988-01-22 1989-07-27 Seiko Instr & Electron Ltd イオンビーム加工装置
JPH08306754A (ja) * 1995-04-27 1996-11-22 Nec Corp 不純物拡散プロファイル測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01187826A (ja) * 1988-01-22 1989-07-27 Seiko Instr & Electron Ltd イオンビーム加工装置
JPH08306754A (ja) * 1995-04-27 1996-11-22 Nec Corp 不純物拡散プロファイル測定方法

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