JPS5141314B2 - - Google Patents
Info
- Publication number
- JPS5141314B2 JPS5141314B2 JP47099848A JP9984872A JPS5141314B2 JP S5141314 B2 JPS5141314 B2 JP S5141314B2 JP 47099848 A JP47099848 A JP 47099848A JP 9984872 A JP9984872 A JP 9984872A JP S5141314 B2 JPS5141314 B2 JP S5141314B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099848A JPS5141314B2 (https=) | 1972-10-06 | 1972-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099848A JPS5141314B2 (https=) | 1972-10-06 | 1972-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4959567A JPS4959567A (https=) | 1974-06-10 |
| JPS5141314B2 true JPS5141314B2 (https=) | 1976-11-09 |
Family
ID=14258208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47099848A Expired JPS5141314B2 (https=) | 1972-10-06 | 1972-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5141314B2 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0610611Y2 (ja) * | 1987-01-13 | 1994-03-16 | 日本電子株式会社 | 電子顕微鏡等の試料装置 |
| JP5240647B2 (ja) * | 2007-07-30 | 2013-07-17 | 株式会社リコー | シール機構、ステージ装置、及び電子線描画装置 |
-
1972
- 1972-10-06 JP JP47099848A patent/JPS5141314B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4959567A (https=) | 1974-06-10 |