JPS4959567A - - Google Patents
Info
- Publication number
- JPS4959567A JPS4959567A JP47099848A JP9984872A JPS4959567A JP S4959567 A JPS4959567 A JP S4959567A JP 47099848 A JP47099848 A JP 47099848A JP 9984872 A JP9984872 A JP 9984872A JP S4959567 A JPS4959567 A JP S4959567A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099848A JPS5141314B2 (https=) | 1972-10-06 | 1972-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47099848A JPS5141314B2 (https=) | 1972-10-06 | 1972-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4959567A true JPS4959567A (https=) | 1974-06-10 |
| JPS5141314B2 JPS5141314B2 (https=) | 1976-11-09 |
Family
ID=14258208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47099848A Expired JPS5141314B2 (https=) | 1972-10-06 | 1972-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5141314B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63111747U (https=) * | 1987-01-13 | 1988-07-18 | ||
| JP2009033005A (ja) * | 2007-07-30 | 2009-02-12 | Ricoh Co Ltd | シール機構、ステージ装置、及び電子線描画装置 |
-
1972
- 1972-10-06 JP JP47099848A patent/JPS5141314B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63111747U (https=) * | 1987-01-13 | 1988-07-18 | ||
| JP2009033005A (ja) * | 2007-07-30 | 2009-02-12 | Ricoh Co Ltd | シール機構、ステージ装置、及び電子線描画装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5141314B2 (https=) | 1976-11-09 |