JPS5139836B2 - - Google Patents

Info

Publication number
JPS5139836B2
JPS5139836B2 JP10018971A JP10018971A JPS5139836B2 JP S5139836 B2 JPS5139836 B2 JP S5139836B2 JP 10018971 A JP10018971 A JP 10018971A JP 10018971 A JP10018971 A JP 10018971A JP S5139836 B2 JPS5139836 B2 JP S5139836B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10018971A
Other languages
Japanese (ja)
Other versions
JPS4865271A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10018971A priority Critical patent/JPS5139836B2/ja
Publication of JPS4865271A publication Critical patent/JPS4865271A/ja
Publication of JPS5139836B2 publication Critical patent/JPS5139836B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10018971A 1971-12-13 1971-12-13 Expired JPS5139836B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10018971A JPS5139836B2 (enrdf_load_stackoverflow) 1971-12-13 1971-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10018971A JPS5139836B2 (enrdf_load_stackoverflow) 1971-12-13 1971-12-13

Publications (2)

Publication Number Publication Date
JPS4865271A JPS4865271A (enrdf_load_stackoverflow) 1973-09-08
JPS5139836B2 true JPS5139836B2 (enrdf_load_stackoverflow) 1976-10-29

Family

ID=14267339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10018971A Expired JPS5139836B2 (enrdf_load_stackoverflow) 1971-12-13 1971-12-13

Country Status (1)

Country Link
JP (1) JPS5139836B2 (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50159567A (enrdf_load_stackoverflow) * 1974-06-14 1975-12-24
JPS58103534A (ja) * 1981-12-16 1983-06-20 Toshiba Corp 真空蒸着装置
JPS5941837A (ja) * 1982-08-31 1984-03-08 Mitsubishi Electric Corp フオトレジストの被着方法
JPS60180144A (ja) * 1984-02-27 1985-09-13 Nec Kansai Ltd 半導体素子製造方法
JP2765673B2 (ja) * 1992-06-04 1998-06-18 インターナショナル・ビジネス・マシーンズ・コーポレイション メタライゼーション層及びその形成方法

Also Published As

Publication number Publication date
JPS4865271A (enrdf_load_stackoverflow) 1973-09-08

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