JPS5137565A - Yokogatakakusanro - Google Patents
YokogatakakusanroInfo
- Publication number
- JPS5137565A JPS5137565A JP11052474A JP11052474A JPS5137565A JP S5137565 A JPS5137565 A JP S5137565A JP 11052474 A JP11052474 A JP 11052474A JP 11052474 A JP11052474 A JP 11052474A JP S5137565 A JPS5137565 A JP S5137565A
- Authority
- JP
- Japan
- Prior art keywords
- gatakakusanro
- yoko
- yoko gatakakusanro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11052474A JPS5137565A (ja) | 1974-09-27 | 1974-09-27 | Yokogatakakusanro |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11052474A JPS5137565A (ja) | 1974-09-27 | 1974-09-27 | Yokogatakakusanro |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5137565A true JPS5137565A (ja) | 1976-03-29 |
JPS533892B2 JPS533892B2 (ja) | 1978-02-10 |
Family
ID=14537974
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11052474A Granted JPS5137565A (ja) | 1974-09-27 | 1974-09-27 | Yokogatakakusanro |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5137565A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5871620A (ja) * | 1981-10-23 | 1983-04-28 | Nec Corp | 半導体拡散法 |
JPS59128158A (ja) * | 1983-01-10 | 1984-07-24 | Shin Osaka Zoki Kk | 折丁結束前処理装置 |
JPS6079715A (ja) * | 1983-10-06 | 1985-05-07 | Rohm Co Ltd | 拡散炉 |
-
1974
- 1974-09-27 JP JP11052474A patent/JPS5137565A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5871620A (ja) * | 1981-10-23 | 1983-04-28 | Nec Corp | 半導体拡散法 |
JPS59128158A (ja) * | 1983-01-10 | 1984-07-24 | Shin Osaka Zoki Kk | 折丁結束前処理装置 |
JPS64301B2 (ja) * | 1983-01-10 | 1989-01-06 | Shin Osaka Zoki Co Ltd | |
JPS6079715A (ja) * | 1983-10-06 | 1985-05-07 | Rohm Co Ltd | 拡散炉 |
Also Published As
Publication number | Publication date |
---|---|
JPS533892B2 (ja) | 1978-02-10 |
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