JPS5136873A - - Google Patents

Info

Publication number
JPS5136873A
JPS5136873A JP10806474A JP10806474A JPS5136873A JP S5136873 A JPS5136873 A JP S5136873A JP 10806474 A JP10806474 A JP 10806474A JP 10806474 A JP10806474 A JP 10806474A JP S5136873 A JPS5136873 A JP S5136873A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10806474A
Other languages
Japanese (ja)
Other versions
JPS541432B2 (enrdf_load_stackoverflow
Inventor
Tadahiro Hashimoto
Yasushi Okuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP10806474A priority Critical patent/JPS541432B2/ja
Priority to US05/613,427 priority patent/US4068018A/en
Publication of JPS5136873A publication Critical patent/JPS5136873A/ja
Publication of JPS541432B2 publication Critical patent/JPS541432B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP10806474A 1974-09-19 1974-09-19 Expired JPS541432B2 (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10806474A JPS541432B2 (enrdf_load_stackoverflow) 1974-09-19 1974-09-19
US05/613,427 US4068018A (en) 1974-09-19 1975-09-15 Process for preparing a mask for use in manufacturing a semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10806474A JPS541432B2 (enrdf_load_stackoverflow) 1974-09-19 1974-09-19

Publications (2)

Publication Number Publication Date
JPS5136873A true JPS5136873A (enrdf_load_stackoverflow) 1976-03-27
JPS541432B2 JPS541432B2 (enrdf_load_stackoverflow) 1979-01-24

Family

ID=14474964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10806474A Expired JPS541432B2 (enrdf_load_stackoverflow) 1974-09-19 1974-09-19

Country Status (1)

Country Link
JP (1) JPS541432B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127557A (en) * 1979-03-24 1980-10-02 Sanyo Electric Co Ltd Photomask and production thereof
JPS5652751A (en) * 1979-10-05 1981-05-12 Dainippon Printing Co Ltd Photomask correcting method
JPS5893052A (ja) * 1981-11-30 1983-06-02 Seiko Epson Corp ホトマスク

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127557A (en) * 1979-03-24 1980-10-02 Sanyo Electric Co Ltd Photomask and production thereof
JPS5652751A (en) * 1979-10-05 1981-05-12 Dainippon Printing Co Ltd Photomask correcting method
JPS5893052A (ja) * 1981-11-30 1983-06-02 Seiko Epson Corp ホトマスク

Also Published As

Publication number Publication date
JPS541432B2 (enrdf_load_stackoverflow) 1979-01-24

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