JPS5135830B2 - - Google Patents
Info
- Publication number
- JPS5135830B2 JPS5135830B2 JP11671573A JP11671573A JPS5135830B2 JP S5135830 B2 JPS5135830 B2 JP S5135830B2 JP 11671573 A JP11671573 A JP 11671573A JP 11671573 A JP11671573 A JP 11671573A JP S5135830 B2 JPS5135830 B2 JP S5135830B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
- C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
- C30B31/10—Reaction chambers; Selection of materials therefor
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Silicon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19722253410 DE2253410C3 (de) | 1972-10-31 | 1972-10-31 | Verfahren zur Herstellung von Rohren für Diffusionsprozesse in der Halbleitertechnik |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4979172A JPS4979172A (US06373033-20020416-M00035.png) | 1974-07-31 |
| JPS5135830B2 true JPS5135830B2 (US06373033-20020416-M00035.png) | 1976-10-05 |
Family
ID=5860539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11671573A Expired JPS5135830B2 (US06373033-20020416-M00035.png) | 1972-10-31 | 1973-10-17 |
Country Status (8)
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3951587A (en) * | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
| FR2516708A1 (fr) * | 1981-11-13 | 1983-05-20 | Comp Generale Electricite | Procede de fabrication de silicium polycristallin pour photopiles solaires |
| FR2529189B1 (fr) * | 1982-06-25 | 1985-08-09 | Comp Generale Electricite | Procede de fabrication d'une bande de silicium polycristallin pour photophiles |
| US4804633A (en) * | 1988-02-18 | 1989-02-14 | Northern Telecom Limited | Silicon-on-insulator substrates annealed in polysilicon tube |
| RU2534388C2 (ru) * | 2013-01-09 | 2014-11-27 | Федеральное Государственное Бюджетное Образовательное Учреждение Высшего Профессионального Образования "Дагестанский Государственный Технический Университет" (Дгту) | Способ очистки карбид-кремниевой трубы |
-
1972
- 1972-10-31 DE DE19722253410 patent/DE2253410C3/de not_active Expired
-
1973
- 1973-03-19 BE BE128974A patent/BE796998A/xx unknown
- 1973-06-28 GB GB3090273A patent/GB1396683A/en not_active Expired
- 1973-10-17 JP JP11671573A patent/JPS5135830B2/ja not_active Expired
- 1973-10-22 FR FR7337548A patent/FR2204457A1/fr not_active Withdrawn
- 1973-10-26 IT IT3062073A patent/IT998997B/it active
- 1973-10-30 SU SU731873560D patent/SU593646A3/ru active
- 1973-10-31 NL NL7314959A patent/NL7314959A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| NL7314959A (US06373033-20020416-M00035.png) | 1974-05-02 |
| JPS4979172A (US06373033-20020416-M00035.png) | 1974-07-31 |
| IT998997B (it) | 1976-02-20 |
| DE2253410A1 (de) | 1974-05-02 |
| GB1396683A (en) | 1975-06-04 |
| DE2253410B2 (de) | 1978-08-31 |
| DE2253410C3 (de) | 1979-05-03 |
| FR2204457A1 (US06373033-20020416-M00035.png) | 1974-05-24 |
| BE796998A (fr) | 1973-07-16 |
| SU593646A3 (ru) | 1978-02-15 |
