JPS5134029U - - Google Patents

Info

Publication number
JPS5134029U
JPS5134029U JP10682674U JP10682674U JPS5134029U JP S5134029 U JPS5134029 U JP S5134029U JP 10682674 U JP10682674 U JP 10682674U JP 10682674 U JP10682674 U JP 10682674U JP S5134029 U JPS5134029 U JP S5134029U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10682674U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10682674U priority Critical patent/JPS5134029U/ja
Publication of JPS5134029U publication Critical patent/JPS5134029U/ja
Pending legal-status Critical Current

Links

JP10682674U 1974-09-05 1974-09-05 Pending JPS5134029U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10682674U JPS5134029U (enrdf_load_stackoverflow) 1974-09-05 1974-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10682674U JPS5134029U (enrdf_load_stackoverflow) 1974-09-05 1974-09-05

Publications (1)

Publication Number Publication Date
JPS5134029U true JPS5134029U (enrdf_load_stackoverflow) 1976-03-12

Family

ID=28323526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10682674U Pending JPS5134029U (enrdf_load_stackoverflow) 1974-09-05 1974-09-05

Country Status (1)

Country Link
JP (1) JPS5134029U (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358319U (enrdf_load_stackoverflow) * 1976-10-20 1978-05-18
JPS562952U (enrdf_load_stackoverflow) * 1979-06-21 1981-01-12
JPS61175376A (ja) * 1985-01-23 1986-08-07 フイツシヤー・コントロールズ・インターナシヨナル・インコーポレーテツド ロールダイアフラム調整弁
JP2000320696A (ja) * 1999-05-06 2000-11-24 Ckd Corp 流量調節弁
WO2014188785A1 (ja) * 2013-05-24 2014-11-27 日立金属株式会社 流量制御弁及びそれを用いたマスフローコントローラ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1283726A (en) * 1968-10-23 1972-08-02 Gaz De France Silent expander for gaseous fluids

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1283726A (en) * 1968-10-23 1972-08-02 Gaz De France Silent expander for gaseous fluids

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358319U (enrdf_load_stackoverflow) * 1976-10-20 1978-05-18
JPS562952U (enrdf_load_stackoverflow) * 1979-06-21 1981-01-12
JPS61175376A (ja) * 1985-01-23 1986-08-07 フイツシヤー・コントロールズ・インターナシヨナル・インコーポレーテツド ロールダイアフラム調整弁
JP2000320696A (ja) * 1999-05-06 2000-11-24 Ckd Corp 流量調節弁
WO2014188785A1 (ja) * 2013-05-24 2014-11-27 日立金属株式会社 流量制御弁及びそれを用いたマスフローコントローラ
JP2014229159A (ja) * 2013-05-24 2014-12-08 日立金属株式会社 流量制御弁及びそれを用いたマスフローコントローラ
CN104969136A (zh) * 2013-05-24 2015-10-07 日立金属株式会社 流量控制阀及使用该流量控制阀的质量流量控制器

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