JPS5132268A - - Google Patents

Info

Publication number
JPS5132268A
JPS5132268A JP10500774A JP10500774A JPS5132268A JP S5132268 A JPS5132268 A JP S5132268A JP 10500774 A JP10500774 A JP 10500774A JP 10500774 A JP10500774 A JP 10500774A JP S5132268 A JPS5132268 A JP S5132268A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10500774A
Other languages
Japanese (ja)
Other versions
JPS5736698B2 (ru
Inventor
Yukio Honda
Satohiko Yamamoto
Toshuki Aida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10500774A priority Critical patent/JPS5736698B2/ja
Publication of JPS5132268A publication Critical patent/JPS5132268A/ja
Publication of JPS5736698B2 publication Critical patent/JPS5736698B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Solid Thermionic Cathode (AREA)
JP10500774A 1974-09-13 1974-09-13 Expired JPS5736698B2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10500774A JPS5736698B2 (ru) 1974-09-13 1974-09-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10500774A JPS5736698B2 (ru) 1974-09-13 1974-09-13

Publications (2)

Publication Number Publication Date
JPS5132268A true JPS5132268A (ru) 1976-03-18
JPS5736698B2 JPS5736698B2 (ru) 1982-08-05

Family

ID=14396004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10500774A Expired JPS5736698B2 (ru) 1974-09-13 1974-09-13

Country Status (1)

Country Link
JP (1) JPS5736698B2 (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875839A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd スパツタ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018100963A1 (ja) 2016-11-30 2018-06-07 富士フイルム株式会社 ガスバリアフィルムおよびガスバリアフィルムの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3312856A (en) * 1963-03-26 1967-04-04 Gen Electric Rhenium supported metallic boride cathode emitters

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3312856A (en) * 1963-03-26 1967-04-04 Gen Electric Rhenium supported metallic boride cathode emitters

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875839A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd スパツタ装置
JPS6364894B2 (ru) * 1981-10-30 1988-12-14

Also Published As

Publication number Publication date
JPS5736698B2 (ru) 1982-08-05

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