JPS5129875A - - Google Patents

Info

Publication number
JPS5129875A
JPS5129875A JP10276074A JP10276074A JPS5129875A JP S5129875 A JPS5129875 A JP S5129875A JP 10276074 A JP10276074 A JP 10276074A JP 10276074 A JP10276074 A JP 10276074A JP S5129875 A JPS5129875 A JP S5129875A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10276074A
Other languages
Japanese (ja)
Inventor
Keiji Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10276074A priority Critical patent/JPS5129875A/ja
Publication of JPS5129875A publication Critical patent/JPS5129875A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Surface Treatment Of Glass (AREA)
JP10276074A 1974-09-06 1974-09-06 Pending JPS5129875A (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10276074A JPS5129875A (enrdf_load_stackoverflow) 1974-09-06 1974-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10276074A JPS5129875A (enrdf_load_stackoverflow) 1974-09-06 1974-09-06

Publications (1)

Publication Number Publication Date
JPS5129875A true JPS5129875A (enrdf_load_stackoverflow) 1976-03-13

Family

ID=14336139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10276074A Pending JPS5129875A (enrdf_load_stackoverflow) 1974-09-06 1974-09-06

Country Status (1)

Country Link
JP (1) JPS5129875A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58114037A (ja) * 1981-12-28 1983-07-07 Konishiroku Photo Ind Co Ltd フオトマスク素材
JPS5982124A (ja) * 1982-10-29 1984-05-12 Showa Paul Kk 段付きポ−ルの製造法
JPS6033556A (ja) * 1983-08-05 1985-02-20 Konishiroku Photo Ind Co Ltd ドライエッチング用フォトマスク素材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843927A (enrdf_load_stackoverflow) * 1971-10-08 1973-06-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843927A (enrdf_load_stackoverflow) * 1971-10-08 1973-06-25

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58114037A (ja) * 1981-12-28 1983-07-07 Konishiroku Photo Ind Co Ltd フオトマスク素材
JPS5982124A (ja) * 1982-10-29 1984-05-12 Showa Paul Kk 段付きポ−ルの製造法
JPS6033556A (ja) * 1983-08-05 1985-02-20 Konishiroku Photo Ind Co Ltd ドライエッチング用フォトマスク素材

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