JPS5128514B2 - - Google Patents

Info

Publication number
JPS5128514B2
JPS5128514B2 JP697172A JP697172A JPS5128514B2 JP S5128514 B2 JPS5128514 B2 JP S5128514B2 JP 697172 A JP697172 A JP 697172A JP 697172 A JP697172 A JP 697172A JP S5128514 B2 JPS5128514 B2 JP S5128514B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP697172A
Other languages
Japanese (ja)
Other versions
JPS4877773A (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP697172A priority Critical patent/JPS5128514B2/ja
Publication of JPS4877773A publication Critical patent/JPS4877773A/ja
Publication of JPS5128514B2 publication Critical patent/JPS5128514B2/ja
Expired legal-status Critical Current

Links

JP697172A 1972-01-19 1972-01-19 Expired JPS5128514B2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP697172A JPS5128514B2 (xx) 1972-01-19 1972-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP697172A JPS5128514B2 (xx) 1972-01-19 1972-01-19

Publications (2)

Publication Number Publication Date
JPS4877773A JPS4877773A (xx) 1973-10-19
JPS5128514B2 true JPS5128514B2 (xx) 1976-08-19

Family

ID=11653073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP697172A Expired JPS5128514B2 (xx) 1972-01-19 1972-01-19

Country Status (1)

Country Link
JP (1) JPS5128514B2 (xx)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5146077A (ja) * 1974-10-18 1976-04-20 Hitachi Ltd Handotaisochi
JPS5335481A (en) * 1976-09-14 1978-04-01 Mitsubishi Electric Corp Production of insulating gate type field effect transistor
JPS6011817B2 (ja) * 1977-11-24 1985-03-28 松下電器産業株式会社 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS4877773A (xx) 1973-10-19

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