JPS5128514B2 - - Google Patents
Info
- Publication number
- JPS5128514B2 JPS5128514B2 JP697172A JP697172A JPS5128514B2 JP S5128514 B2 JPS5128514 B2 JP S5128514B2 JP 697172 A JP697172 A JP 697172A JP 697172 A JP697172 A JP 697172A JP S5128514 B2 JPS5128514 B2 JP S5128514B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP697172A JPS5128514B2 (en:Method) | 1972-01-19 | 1972-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP697172A JPS5128514B2 (en:Method) | 1972-01-19 | 1972-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4877773A JPS4877773A (en:Method) | 1973-10-19 |
| JPS5128514B2 true JPS5128514B2 (en:Method) | 1976-08-19 |
Family
ID=11653073
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP697172A Expired JPS5128514B2 (en:Method) | 1972-01-19 | 1972-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5128514B2 (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5146077A (ja) * | 1974-10-18 | 1976-04-20 | Hitachi Ltd | Handotaisochi |
| JPS5335481A (en) * | 1976-09-14 | 1978-04-01 | Mitsubishi Electric Corp | Production of insulating gate type field effect transistor |
| JPS6011817B2 (ja) * | 1977-11-24 | 1985-03-28 | 松下電器産業株式会社 | 半導体装置の製造方法 |
-
1972
- 1972-01-19 JP JP697172A patent/JPS5128514B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4877773A (en:Method) | 1973-10-19 |