JPS5123393B2 - - Google Patents

Info

Publication number
JPS5123393B2
JPS5123393B2 JP47099291A JP9929172A JPS5123393B2 JP S5123393 B2 JPS5123393 B2 JP S5123393B2 JP 47099291 A JP47099291 A JP 47099291A JP 9929172 A JP9929172 A JP 9929172A JP S5123393 B2 JPS5123393 B2 JP S5123393B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47099291A
Other languages
Japanese (ja)
Other versions
JPS4955573A (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47099291A priority Critical patent/JPS5123393B2/ja
Priority to US05/403,060 priority patent/US3953619A/en
Publication of JPS4955573A publication Critical patent/JPS4955573A/ja
Publication of JPS5123393B2 publication Critical patent/JPS5123393B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP47099291A 1972-10-03 1972-10-03 Expired JPS5123393B2 (cg-RX-API-DMAC10.html)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP47099291A JPS5123393B2 (cg-RX-API-DMAC10.html) 1972-10-03 1972-10-03
US05/403,060 US3953619A (en) 1972-10-03 1973-10-03 Method for ionization electrostatic plating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47099291A JPS5123393B2 (cg-RX-API-DMAC10.html) 1972-10-03 1972-10-03

Publications (2)

Publication Number Publication Date
JPS4955573A JPS4955573A (cg-RX-API-DMAC10.html) 1974-05-29
JPS5123393B2 true JPS5123393B2 (cg-RX-API-DMAC10.html) 1976-07-16

Family

ID=14243524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47099291A Expired JPS5123393B2 (cg-RX-API-DMAC10.html) 1972-10-03 1972-10-03

Country Status (2)

Country Link
US (1) US3953619A (cg-RX-API-DMAC10.html)
JP (1) JPS5123393B2 (cg-RX-API-DMAC10.html)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51111483A (en) * 1975-03-28 1976-10-01 Matsushita Electric Ind Co Ltd Method of preparing thin layer of compound
JPS589156B2 (ja) * 1975-03-28 1983-02-19 松下電器産業株式会社 イオン化プレ−テイング装置
JPS51111436A (en) * 1975-03-28 1976-10-01 Matsushita Electric Industrial Co Ltd Ion plating device
CH619344B (de) * 1977-12-23 Balzers Hochvakuum Verfahren zur herstellung goldfarbener ueberzuege.
JPS5594472A (en) * 1979-01-09 1980-07-17 Citizen Watch Co Ltd Forming method for coating
CH624817B (de) * 1979-09-04 Balzers Hochvakuum Verfahren zur herstellung goldfarbener ueberzuege.
EP0029747A1 (en) * 1979-11-27 1981-06-03 Konica Corporation An apparatus for vacuum deposition and a method for forming a thin film by the use thereof
DE3167761D1 (en) * 1980-01-16 1985-01-31 Nat Res Dev Method and apparatus for depositing coatings in a glow discharge
US4520268A (en) * 1983-05-26 1985-05-28 Pauline Y. Lau Method and apparatus for introducing normally solid materials into substrate surfaces
US4731539A (en) * 1983-05-26 1988-03-15 Plaur Corporation Method and apparatus for introducing normally solid material into substrate surfaces
GB8405170D0 (en) * 1984-02-28 1984-04-04 Atomic Energy Authority Uk Titanium alloy hip prosthesis
US6039849A (en) * 1997-10-28 2000-03-21 Motorola, Inc. Method for the manufacture of electronic components

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290567A (en) * 1960-09-23 1966-12-06 Technical Ind Inc Controlled deposition and growth of polycrystalline films in a vacuum
US3297465A (en) * 1963-12-31 1967-01-10 Ibm Method for producing organic plasma and for depositing polymer films
US3419487A (en) * 1966-01-24 1968-12-31 Dow Corning Method of growing thin film semiconductors using an electron beam
US3492152A (en) * 1967-01-30 1970-01-27 Gen Dynamics Corp Method of vacuum vapor depositing a material on a substrate including reconstitution of decomposed portions of the material
US3639151A (en) * 1969-03-13 1972-02-01 United Aircraft Corp Vapor randomization in vacuum deposition of coatings

Also Published As

Publication number Publication date
JPS4955573A (cg-RX-API-DMAC10.html) 1974-05-29
US3953619A (en) 1976-04-27

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