JPS5122239B2 - - Google Patents
Info
- Publication number
- JPS5122239B2 JPS5122239B2 JP48092948A JP9294873A JPS5122239B2 JP S5122239 B2 JPS5122239 B2 JP S5122239B2 JP 48092948 A JP48092948 A JP 48092948A JP 9294873 A JP9294873 A JP 9294873A JP S5122239 B2 JPS5122239 B2 JP S5122239B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Laser Beam Processing (AREA)
- Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48092948A JPS5122239B2 (https=) | 1973-08-21 | 1973-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP48092948A JPS5122239B2 (https=) | 1973-08-21 | 1973-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5042499A JPS5042499A (https=) | 1975-04-17 |
| JPS5122239B2 true JPS5122239B2 (https=) | 1976-07-08 |
Family
ID=14068677
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP48092948A Expired JPS5122239B2 (https=) | 1973-08-21 | 1973-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5122239B2 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0747232B2 (ja) * | 1989-04-03 | 1995-05-24 | 大阪府 | 金属表面のレーザ加工方法 |
| US6291797B1 (en) | 1996-08-13 | 2001-09-18 | Nippon Sheet Glass Co., Ltd. | Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device |
| JP4416481B2 (ja) * | 2003-11-18 | 2010-02-17 | ギガフォトン株式会社 | 光学的パルス伸長器および露光用放電励起ガスレーザ装置 |
| US20050286599A1 (en) * | 2004-06-29 | 2005-12-29 | Rafac Robert J | Method and apparatus for gas discharge laser output light coherency reduction |
| US7433372B2 (en) * | 2006-06-05 | 2008-10-07 | Cymer, Inc. | Device and method to stabilize beam shape and symmetry for high energy pulsed laser applications |
-
1973
- 1973-08-21 JP JP48092948A patent/JPS5122239B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5042499A (https=) | 1975-04-17 |