JPS5042499A - - Google Patents

Info

Publication number
JPS5042499A
JPS5042499A JP48092948A JP9294873A JPS5042499A JP S5042499 A JPS5042499 A JP S5042499A JP 48092948 A JP48092948 A JP 48092948A JP 9294873 A JP9294873 A JP 9294873A JP S5042499 A JPS5042499 A JP S5042499A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48092948A
Other languages
Japanese (ja)
Other versions
JPS5122239B2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48092948A priority Critical patent/JPS5122239B2/ja
Publication of JPS5042499A publication Critical patent/JPS5042499A/ja
Publication of JPS5122239B2 publication Critical patent/JPS5122239B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laser Beam Processing (AREA)
  • Lasers (AREA)
JP48092948A 1973-08-21 1973-08-21 Expired JPS5122239B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48092948A JPS5122239B2 (https=) 1973-08-21 1973-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48092948A JPS5122239B2 (https=) 1973-08-21 1973-08-21

Publications (2)

Publication Number Publication Date
JPS5042499A true JPS5042499A (https=) 1975-04-17
JPS5122239B2 JPS5122239B2 (https=) 1976-07-08

Family

ID=14068677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48092948A Expired JPS5122239B2 (https=) 1973-08-21 1973-08-21

Country Status (1)

Country Link
JP (1) JPS5122239B2 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263589A (ja) * 1989-04-03 1990-10-26 Osaka Prefecture 金属表面のレーザ加工方法
US6291797B1 (en) 1996-08-13 2001-09-18 Nippon Sheet Glass Co., Ltd. Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
JP2005148550A (ja) * 2003-11-18 2005-06-09 Gigaphoton Inc 光学的パルス伸長器および露光用放電励起ガスレーザ装置
JP2008505495A (ja) * 2004-06-29 2008-02-21 サイマー インコーポレイテッド ガス放電レーザの出力光の干渉性を低減させる方法及び装置
JP2009540567A (ja) * 2006-06-05 2009-11-19 サイマー インコーポレイテッド 高エネルギー・パルスレーザ用途のためのビーム形状及び対称性を安定化させるための装置及び方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263589A (ja) * 1989-04-03 1990-10-26 Osaka Prefecture 金属表面のレーザ加工方法
US6291797B1 (en) 1996-08-13 2001-09-18 Nippon Sheet Glass Co., Ltd. Laser machining method for glass substrate, diffraction type optical device fabricated by the machining method, and method of manufacturing optical device
US6645603B2 (en) 1996-08-13 2003-11-11 Nippon Sheet Glass Co., Ltd. Laser processing method to a glass substrate and an optical diffraction element obtained thereby, and a method for manufacturing optical elements
US6924457B2 (en) 1996-08-13 2005-08-02 Nippon Sheet Glass Co., Ltd. Laser processing method to a class substrate and an optical diffraction element obtained thereby, and a method for manufacturing optical elements
JP2005148550A (ja) * 2003-11-18 2005-06-09 Gigaphoton Inc 光学的パルス伸長器および露光用放電励起ガスレーザ装置
JP2008505495A (ja) * 2004-06-29 2008-02-21 サイマー インコーポレイテッド ガス放電レーザの出力光の干渉性を低減させる方法及び装置
JP2009540567A (ja) * 2006-06-05 2009-11-19 サイマー インコーポレイテッド 高エネルギー・パルスレーザ用途のためのビーム形状及び対称性を安定化させるための装置及び方法

Also Published As

Publication number Publication date
JPS5122239B2 (https=) 1976-07-08

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