JPS51147348A - Photoelectronic microscope - Google Patents

Photoelectronic microscope

Info

Publication number
JPS51147348A
JPS51147348A JP7150075A JP7150075A JPS51147348A JP S51147348 A JPS51147348 A JP S51147348A JP 7150075 A JP7150075 A JP 7150075A JP 7150075 A JP7150075 A JP 7150075A JP S51147348 A JPS51147348 A JP S51147348A
Authority
JP
Japan
Prior art keywords
microscope
photoelectronic
detecting
concerned
high accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7150075A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5335466B2 (cs
Inventor
Shigeo Moriyama
Yoshio Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7150075A priority Critical patent/JPS51147348A/ja
Priority to DE2626363A priority patent/DE2626363C2/de
Priority to NL7606427A priority patent/NL7606427A/xx
Priority to US05/695,556 priority patent/US4045141A/en
Publication of JPS51147348A publication Critical patent/JPS51147348A/ja
Publication of JPS5335466B2 publication Critical patent/JPS5335466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP7150075A 1975-06-13 1975-06-13 Photoelectronic microscope Granted JPS51147348A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP7150075A JPS51147348A (en) 1975-06-13 1975-06-13 Photoelectronic microscope
DE2626363A DE2626363C2 (de) 1975-06-13 1976-06-11 Fotoelektrisches Meßmikroskop
NL7606427A NL7606427A (nl) 1975-06-13 1976-06-14 Fotoelektrische microscoop.
US05/695,556 US4045141A (en) 1975-06-13 1976-06-14 Photoelectric microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7150075A JPS51147348A (en) 1975-06-13 1975-06-13 Photoelectronic microscope

Publications (2)

Publication Number Publication Date
JPS51147348A true JPS51147348A (en) 1976-12-17
JPS5335466B2 JPS5335466B2 (cs) 1978-09-27

Family

ID=13462444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7150075A Granted JPS51147348A (en) 1975-06-13 1975-06-13 Photoelectronic microscope

Country Status (1)

Country Link
JP (1) JPS51147348A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59148973U (ja) * 1983-03-24 1984-10-04 サンデン株式会社 熱交換器

Also Published As

Publication number Publication date
JPS5335466B2 (cs) 1978-09-27

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