Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP6951275ApriorityCriticalpatent/JPS51146170A/en
Publication of JPS51146170ApublicationCriticalpatent/JPS51146170A/en
PURPOSE: A light source device for exposure light, that prevents worsening of O ring for use of light source cooling water tight from water leakage and burning of light source.
COPYRIGHT: (C)1976,JPO&Japio
JP6951275A1975-06-111975-06-11Light source device for exposure light
PendingJPS51146170A
(en)