JPS51145570A - Method of producing porous silicon layer - Google Patents

Method of producing porous silicon layer

Info

Publication number
JPS51145570A
JPS51145570A JP6981275A JP6981275A JPS51145570A JP S51145570 A JPS51145570 A JP S51145570A JP 6981275 A JP6981275 A JP 6981275A JP 6981275 A JP6981275 A JP 6981275A JP S51145570 A JPS51145570 A JP S51145570A
Authority
JP
Japan
Prior art keywords
silicon layer
porous silicon
producing porous
producing
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6981275A
Other languages
Japanese (ja)
Other versions
JPS586000B2 (en
Inventor
Kazutoshi Nagano
Kousei Kajiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP6981275A priority Critical patent/JPS586000B2/en
Publication of JPS51145570A publication Critical patent/JPS51145570A/en
Publication of JPS586000B2 publication Critical patent/JPS586000B2/en
Expired legal-status Critical Current

Links

JP6981275A 1975-06-09 1975-06-09 Takoushitsu Silicon Sounoseizouhouhou Expired JPS586000B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6981275A JPS586000B2 (en) 1975-06-09 1975-06-09 Takoushitsu Silicon Sounoseizouhouhou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6981275A JPS586000B2 (en) 1975-06-09 1975-06-09 Takoushitsu Silicon Sounoseizouhouhou

Publications (2)

Publication Number Publication Date
JPS51145570A true JPS51145570A (en) 1976-12-14
JPS586000B2 JPS586000B2 (en) 1983-02-02

Family

ID=13413533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6981275A Expired JPS586000B2 (en) 1975-06-09 1975-06-09 Takoushitsu Silicon Sounoseizouhouhou

Country Status (1)

Country Link
JP (1) JPS586000B2 (en)

Also Published As

Publication number Publication date
JPS586000B2 (en) 1983-02-02

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