JPS51140485A - Wafer index detector - Google Patents
Wafer index detectorInfo
- Publication number
- JPS51140485A JPS51140485A JP50064192A JP6419275A JPS51140485A JP S51140485 A JPS51140485 A JP S51140485A JP 50064192 A JP50064192 A JP 50064192A JP 6419275 A JP6419275 A JP 6419275A JP S51140485 A JPS51140485 A JP S51140485A
- Authority
- JP
- Japan
- Prior art keywords
- index detector
- wafer index
- wafer
- detector
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To provide a wafer index detector which can automatically detect in accuracy with simple method without defects.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50064192A JPS51140485A (en) | 1975-05-30 | 1975-05-30 | Wafer index detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50064192A JPS51140485A (en) | 1975-05-30 | 1975-05-30 | Wafer index detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51140485A true JPS51140485A (en) | 1976-12-03 |
Family
ID=13250945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50064192A Pending JPS51140485A (en) | 1975-05-30 | 1975-05-30 | Wafer index detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51140485A (en) |
-
1975
- 1975-05-30 JP JP50064192A patent/JPS51140485A/en active Pending
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Legal Events
Date | Code | Title | Description |
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
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R250 | Receipt of annual fees |
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FPAY | Renewal fee payment (prs date is renewal date of database) |
Year of fee payment: 8 Free format text: PAYMENT UNTIL: 20090216 |
|
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100216 Year of fee payment: 9 |
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LAPS | Cancellation because of no payment of annual fees |